XY工作台六自由度误差在线测量和补偿  

On-line six-degree-of-freedom errors measurement and compensation for XY stages

作　　者：林荣炜 程真英[1] 何亚雄[1] 李洁 李瑞君[1] LIN Rongwei;CHENG Zhenying;HE Yaxiong;LI Jie;LI Ruijun(Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室,安徽合肥230009

出　　处：《光学精密工程》2023年第12期1761-1773,共13页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.52175506);国家重点研发计划资助项目(No.2019YFB2004900)。

摘　　要：为提高XY工作台对应功能点的空间位置精度,提出了一种六自由度(6-DOF)误差在线测量方法,并建立了相应的误差补偿模型。采用激光干涉原理测量工作台X,Y轴方向的定位误差和Z轴方向的直线度误差,采用激光自准直原理测量工作台绕X,Y,Z轴转动的角度误差,从而实现6-DOF误差的在线测量。分析了6-DOF误差造成工作台对应功能点的空间位置误差,建立了基于阿贝原则和布莱恩原则的误差补偿模型。根据提出的测量方法,研制了一套高精度紧凑型的在位、在线6-DOF测量系统,将其应用于一台微纳米三坐标测量机的工作台上;以SIOS激光干涉仪为参考,对测量系统和误差补偿模型的有效性进行了实验验证,并评定了系统的不确定度。结果表明:经过6-DOF误差测量和补偿后,参考功能点在X,Y,Z向的最大位置误差由1.7μm,3.4μm,3μm分别减小至65 nm,81 nm,109 nm,其扩展不确定度分别为90 nm,98 nm,158 nm(k=2)。该方法和系统可被用于提高XY工作台的精度。An on-line six-degree-of-freedom(6-DOF)error measurement method and compensation model for XY stages were devised for improving the volumetric positional accuracy of the functional point.The positioning errors in the X-and Y-directions of the stage and the straightness error in the Z-direction were measured via laser interferometry,and the three angular motion errors around the X-,Y-,and Z-axes were measured using laser autocollimators.The volumetric positional errors of the functional point caused by the 6-DOF errors of the stage was analyzed,and an error compensation model based on the Abbe and Bryan principle was developed.An in-situ and on-line 6-DOF error measurement system based on the measurement method was developed and applied to a micro-nano coordinate measuring machine,which had high precision and a compact design.The capability of the system and the effectiveness of the model were experimentally verified,and the measurement uncertainty of the system was evaluated.SIOS laser interferometers were used as a reference.Experimental results indicated that the maximum positional errors at the reference functional point in the X-,Y-,and Z-directions were reduced from 1.7,3.4,and 3μm to 65,81,and 109 nm,respectively,after error compensation,and the expanded uncertainty was 90,98,and 158 nm(k=2),respectively.The proposed method and system can be used to increase the accuracy of XY stages.

关 键 词：XY工作台 多自由度 补偿模型 阿贝原则 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]