MEMS三轴加速度计误差标定与补偿方法研究  

Research on error calibration and compensation method for MEMS three-axis accelerometer

作　　者：刘有彬 闫欢[1] 彭根斋 白雪 杨勤 LIU Youbin;YAN Huan;PENG Genzhai;BAI Xue;YANG Qin(The 9th Research Institute of China Electronics Technology Group Corporation,Mianyang 621000,China)

机构地区：[1]中国电子科技集团公司第九研究所,四川绵阳621000

出　　处：《传感器与微系统》2023年第11期58-61,65,共5页Transducer and Microsystem Technologies

摘　　要：为了提高微机电系统(MEMS)三轴加速度计的测量精度,建立了MEMS三轴加速度计卡尔曼滤波模型,根据MEMS三轴加速度计的输出误差模型,推导了基于六位置法的误差补偿数学模型,并给出了数学模型中补偿参数的解算方法。最后基于自主研发的电子罗盘进行了实验验证,实验结果表明:经过卡尔曼滤波后,MEMS三轴加速度计输出噪声减小了74%;经过六位置法标定后,MEMS三轴加速度计的测量精度提升了1个数量级,解算得到的倾斜角精度由5.9°RMS提高到0.3°RMS。In order to improve the measurement precision of MEMS three-axis accelerometer,the Kalman filter model of MEMS three-axis accelerometer is established,and according to the output error model of MEMS three-axis accelerometer,the error compensation mathematical model based on six position method is deduced and established,and the solution method of the compensation parameter is given.Finally,experimental verification based on the self-developed electronic compass is carried out.The experimental results show that the output noise of MEMS three-axis accelerometer is reduced by 74%after Kalman filtering.After six position calibration,the measurement precision is improved by one order of magnitude,and the tilt angle precision is improved from 5.9°RMS to 0.3°RMS.

关 键 词：微机电系统三轴加速度计 卡尔曼滤波 六位置法 标定与补偿 电子罗盘 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH701[自动化与计算机技术—控制科学与工程]