一种可控大角度偏转的MEMS微镜仿真设计  

Simulation Design of a MEMS Micro Mirror with Controllable Large Angle Deflection

作　　者：和学泰 张博伦 祝方舟 杨晓晖 李庆党 HE Xuetai;ZHANG Bolun;ZHU Fangzhou;YANG Xiaohui;LI Qingdang(School of Mechanical and Electrical Engineering,Qingdao University of Science and Technology,Qingdao 266100;Sino-German Institute of Economic Engineering,Qingdao University of Science and Technology,Qingdao 266100)

机构地区：[1]青岛科技大学机电工程学院,青岛266100 [2]青岛科技大学中德科技学院,青岛266100

出　　处：《计算机与数字工程》2023年第9期2201-2206,共6页Computer & Digital Engineering

摘　　要：论文针对现有的MEMS微镜偏转力小、变形位移小、偏转角度小、角度偏转以及镜面偏转时会发生镜面卷曲等问题,设计出了一种新型结构的电热式MEMS微镜。论文中的MEMS微镜不仅更符合加工工艺的需求,并且偏转角度大、位移大、一定程度上偏转角度可控,并且不会产生电热式MEMS微镜在热膨胀效应的作用下镜面卷曲问题。通过对驱动原理的分析不仅得到了角度的关系量,而且通过仿真软件的模拟也最终得到了符合要求的结构。Aiming at the problems of small deflection force,small deformation displacement,small deflection angle,angle deflection and mirror curl during mirror deflection,a new structure of electrothermal MEMS micro mirror is designed in this paper.The MEMS micro mirror in this paper not only meets the needs of processing technology,but also has large deflection angle,large displacement,controllable deflection angle to a certain extent,and will not produce the mirror curl problem of electrothermal MEMS micro mirror under the action of thermal expansion effect.Through the analysis of the driving principle,not only the relationship quantity of the angle is obtained,but also the structure required by the symbol is finally obtained through the simulation of the simulation software.

关 键 词：微机电系统 微光机电系统 微镜驱动 电热式微镜仿真 

分 类 号：TN491[电子电信—微电子学与固体电子学]