共溅射制备a-Si-Ag薄膜及其电化学储氢性能  

Preparation and electrochemical hydrogen storage performance of a-Si-Ag thin films by Co-sputtering

作　　者：林博洋 张海民 刘馨卉[1] 张乾坤 罗永春 LIN Boyang;ZHANG Haimin;LIU Xinhui;ZHANG Qiankun;LUO Yongchun(School of Materials Science and Engineering,Lanzhou University of Technology,Lanzhou 730050,Gansu,China;State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals,Lanzhou University of Technology,Lanzhou 730050,Gansu,China;School of Science,Lanzhou University of Technology,Lanzhou 730050,Gansu,China)

机构地区：[1]兰州理工大学材料科学与工程学院,甘肃兰州730050 [2]兰州理工大学省部共建有色金属先进加工与再利用国家重点实验室,甘肃兰州730050 [3]兰州理工大学理学院,甘肃兰州730050

出　　处：《金属功能材料》2023年第6期71-79,共9页Metallic Functional Materials

基　　金：国家自然科学基金(22065020)。

摘　　要：氢化非晶硅(a-Si:H)薄膜因其具有很高的电化学储氢容量而在质子型电池中极具研究和应用价值,但其电化学循环稳定性较差的问题已然成为其商业化应用的最大阻碍。为了改善a-Si薄膜的导电性和力学性能以提高a-Si薄膜电极的电化学容量和循环寿命,通过磁控共溅射技术制备了具有不同Ag含量的复相Si-Ag薄膜,研究了高导电性金属Ag对a-Si薄膜电极在质子型离子液体中电化学储氢性能的影响。结果表明,在磁控溅射制备的Si-Ag薄膜中,Ag以单质纳米晶颗粒的形式弥散分布在非晶态a-Si基体中;复相Si-Ag薄膜的导电性能和电化学储氢性能均优于a-Si薄膜电极,其中Ag原子分数为20%时的Si-Ag薄膜电极具有高达887.7 mAh·g^(-1)的电化学容量,经100次充放电循环后其容量保持率S_(100)为64.23%。Ag纳米颗粒的引入可以有效缓解Si-Ag薄膜充放电过程中的体积效应,改善了薄膜电极的循环性能。Hydrogenated amorphous silicon(a-Si:H)films are of great research and application value in proton batteries because of their high electrochemical hydrogen storage capacity,but their poor electrochemical cycle stability has become the biggest obstacle to their commercial application.In order to improve the conductivity and mechanical properties of a-Si thin films and increase the electrochemical capacity and cycle life of a-Si thin films electrodes,multiphase Si-Ag thin films with different Ag contents were prepared by magnetron co-sputtering technology.The effects of high conductivity metal Ag on the electrochemical hydrogen storage performance of a-Si thin films electrodes in proton-type ionic liquids were studied.The results show that in Si-Ag films prepared by magnetron sputtering,Ag disperses in the amorphous a-Si matrix in the form of elemental nanocrystalline particles,conductivity and electrochemical hydrogen storage performance of the multiphase Si-Ag thin film are better than those of pure a-Si thin film electrode.When the Ag atom content is 20%,Si-Ag thin film electrode has the electrochemical capacity of 887.7 mAh·g^(-1)and the capacity retention rate of S_(100)reaches 64.23% after 100 cycles of charge and discharge.Introduction of Ag nanoparticles can effectively alleviate the volume effect during the charging and discharging process of Si-Ag film,and improve the cycling performance of the film electrode.

关 键 词：磁控共溅射 非晶硅薄膜 硅-银复合薄膜 电化学储氢 

分 类 号：TB383.2[一般工业技术—材料科学与工程]