晶圆制造AMHS防堵塞路径规划方法研究  

Research on Anti-Congestion Path Planning Method for Automation Material Handling System in Wafer Manufacturing

作　　者：吴立辉[1,2] 李元生 周秀 张中伟 WU Li-hui;LI Yuan-sheng;ZHOU Xiu;ZHANG Zhong-wei(School of Mechanical and Electrical Engineering,Henan University of Technology,Zhengzhou Henan 450001,China;School of Mechanical Engineering,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]河南工业大学机电工程学院,河南郑州450001 [2]上海应用技术大学机械工程学院,上海201418

出　　处：《计算机仿真》2023年第11期284-289,共6页Computer Simulation

基　　金：国家自然科学基金项目(U1704156);河南省科技攻关计划项目(212102210357);上海应用技术大学引进人才科研启动项目(YJ2022-33)。

摘　　要：自动化物料运输系统(Automated Material Handling System,AMHS)是12英寸晶圆制造系统至关重要的组成部分,AMHS中的天车(Overhead Hoist Transport,OHT)频繁堵塞严重影响AMHS和晶圆制造系统的运行性能。为减少AMHS运行中的OHT堵塞,提出一种基于运输导轨通行权重动态调整与Dijkstra算法(Guide-rail Passing-weight Dynamic Adjustment and Dijkstra Algorithm,GPDADA)的动态路径规划方法。方法基于各运输导轨中的OHT实时通行时间与实时堵塞信息动态调整运输导轨通行权重表,并采用Dijkstra算法动态获取通行权重加权最小的OHT优化搬运路径。实验研究表明,提出的GPDADA方法在多个AMHS性能指标方面均优于传统OHT防堵塞路径规划方法,验证了GPDADA方法的有效性。Automatic material handling systems(AMHS)are vital parts of the 12-inch wafer manufacturing sys-tems.The frequent congestion of overhead hoist transporter(OHT)seriously affects the operation performance of AMHS and wafer manufacturing systems.To deal with the trafic congestion of AMHS,a dynamic path planning ap-proach based on the guide-rail passing-weight dynamic adjustment method and Dijkstra algorithm(GPDADA)is pro-posed.The guide rail's passing weight table was dynamically adjusted based on the OHT's real-time passing time and guide rails'real-time congestion information in each transportation guide rail.The OHT transport route with the smal-lest passing weight sum was dynamically regulated with the Dijkstra algorithm.The experimental results indicate that the GPDADA method is superior to the traditional OHT anti-congestion path planning method in multiple AMHS per-formance metrics,which shows the effectiveness of the proposed method.

关 键 词：晶圆制造 自动化物料运输系统 防堵塞 路径规划 动态调整 

分 类 号：TH128[机械工程—机械设计及理论] TP319[自动化与计算机技术—计算机软件与理论]