超表面在微测辐射热计中的应用  

Application of Metasurfaces in Microbolometers

作　　者：杨君 袁俊[1] 杨春丽[1] 王文金 张杰 李华妮 YANG Jun;YUAN Jun;YANG Chuni;WANG Wenjin;ZHANG Jie;LI Huani(Kunming Institute of Physics,Kunming 650223,China)

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2024年第1期1-11,共11页Infrared Technology

摘　　要：超表面突破了传统自然材料的电磁特性限制,同时也解决了三维超材料难以加工实现等瓶颈问题,使器件朝着集成化,小型化,低成本,可调谐的方向不断发展。目前超表面已在许多领域得到了较为广泛的应用,在探测器领域也越来越受到人们的重视,通过独特的材料、结构设计,超表面可有效完成电磁波各项特性的精确调控,通过超表面的集成,微测辐射热计在光吸收增强,器件波段选择改善等方面有了更多的可能性。本文针对超表面及其在微测辐射热计上的应用研究进行了阐述,展现了超表面在这一领域的发展趋势和广阔前景。Metasurfaces have overcome the electromagnetic limitations of traditional natural materials and solved the bottlenecks of difficult processing and implementation of three-dimensional metamaterials,leading devices to continuously develop towards integration,miniaturization,low cost,and tunability.Metasurfaces are widely used in many fields and are increasingly valued in the field of detectors.Through unique material and structural designs,metasurfaces can effectively achieve precise control of various electromagnetic wave characteristics.Through the integration of metasurfaces,microbolometers are more likely to enhance light absorption and improve the device band selection.This article elaborates on the research on metasurfaces and their applications in microbolometers,demonstrating the development trend and broad prospects of metasurfaces in this field.

关 键 词：超表面 微测辐射热计 光吸收增强 波段选择 

分 类 号：TN214[电子电信—物理电子学]