基于双螺旋式加热器的柔性MEMS流量传感器  

Flexible MEMS flow sensor based on double-helix heater

作　　者：王琪[1] 冯建国 马渊明[1] 陈兴[1] 许高斌[1] WANG Qi;FENG Jianguo;MA Yuanming;CHEN Xing;XU Gaobin(Microelectromechanical System Research Center of Engineering and Technology of Anhui Province,School of Microelectronics,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学安徽省微电子机械系统工程技术研究中心微电子学院,安徽合肥230009

出　　处：《传感器与微系统》2024年第2期41-44,共4页Transducer and Microsystem Technologies

基　　金：国家重点研发计划资助项目(2020YFB2008901);中央高校基本科研业务费专项资金资助项目(JZ2021HGQA0254);中央高校基本科研业务费专项资金资助项目(JZ2021HGTA0147);安徽省发改委研发创新资助项目(JZ2021AFKJ0050)。

摘　　要：针对传统流量传感器的量程限制,提出了一种基于双螺旋结构加热器的柔性基底微机电系统(MEMS)热式流量传感器。在基底上打出均匀通孔阵列以降低热传导损耗,两对测温电阻对称分布在加热器两侧,以获得较宽量程,在微小流量与大流量下均表现出较高灵敏度。采用基于惠斯通电桥的检测电路实现输出电压的测量,同时保持加热器与环境温度恒定温差200 K,对电阻自热进行补偿。传感器工作温度-100~400℃,量程为0~60 m/s;低流速下灵敏度约为12.75 V/(m·s^(-1)),分辨率可达0.001 mm/s,高流速下灵敏度约为1.4 mV/(m·s^(-1)),功耗低至1.3 mW。To overcome the range limitation of traditional flow sensors,a flexible substrate MEMS thermal flow sensor based on double helix structure heater is proposed.To reduce the heat conduction loss,an uniform through-hole array is made on the substrate.Two pairs of temperature measurement resistors are symmetrically distributed on both sides of the heater,resulting in a wide range and high sensitivity at both small and large flow.The output voltage is measured using a detection circuit based on Wheatstone bridge,at the same time,maintain a constant temperature difference of 200 K between the heater and the ambient temperature to compensate for the self-heating of the resistor.The operating temperature of the sensor is^(-1)00~400℃,and the range is 0~60 m/s.The sensitivity is about 12.75 V/(m·s^(-1))at low flow rates with a resolution of 0.001 mm/s,the sensitivity is about 1.4 mV/(m·s^(-1))at a high flow rate.The power consumption is as low as 1.3 mW.

关 键 词：微机电系统 热流量 双螺旋结构 热温差式 柔性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]