CVD法制备铝化物涂层组织结构的温度依赖效应  

Temperature-Dependent Effect of Microstructure of Aluminide Coating Prepared by CVD

作　　者：齐浩雄 吴勇 刘梅军 孟国辉 孙清云 陈同舟 段海涛 杨冠军[1] QI Haoxiong;WU Yong;LIU Meijun;MENG Guohui;SUN Qingyun;CHEN Tongzhou;DUAN Haitao;YANG Guanjun(State Key Laboratory for Mechanical Behavior of Materials,Xi'an Jiaotong University,Xi'an 710049,China;Wuhan Research Institute of Materials Protection Co.,Ltd.CAM,Wuhan 430030,China)

机构地区：[1]西安交通大学金属材料强度国家重点实验室,陕西西安710049 [2]中国机械总院集团武汉材料保护研究所有限公司,湖北武汉430030

出　　处：《表面工程与再制造》2023年第6期52-55,共4页Surface Engineering & Remanufacturing

摘　　要：铝化物涂层制备技术由于非视线性沉积优势广泛应用于燃气轮机关键热端部件上,可在部件外表面以及内腔表面制备抗氧化耐腐蚀铝化物涂层。涂层的组织结构是影响其服役性能的关键,然而如何调控铝化物涂层的组织结构从而获得理想性能的涂层是目前研究的难点问题。针对这一问题,研究了关键制备参数温度对铝化物涂层组织结构的影响作用。首先,采用化学气相沉积方法(CVD)在Mar-M247镍基高温合金表面制备了不同沉积温度下的铝化物涂层。然后,采用扫描电子显微镜(SEM)、X射线衍射仪(XRD)以及能谱分析仪(EDS)分析了铝化物涂层的显微组织结构、物相组成以及合金元素在涂层中的分布情况。结果表明,不同沉积温度下所得到的铝化物涂层均为双层结构,外层是富含Al元素的β-NiAl层,内层为富含拓扑密排相(TCP)的互扩散层;随着沉积温度的升高,β-NiAl层与互扩散层的厚度逐渐增加,两者与温度之间具有正相关关系。本研究揭示的温度参数对铝化物涂层组织结构的作用规律可为高性能CVD法铝化物涂层的制备提供参考。Owing to the advantages of non-line-of-sight deposition,the aluminide coating preparation technology is widely used on key hot-end components of gas turbines,and can prepare oxidation-resistant and corrosion-resistant aluminide coatings on the outer surface and inner cavity surface of the components.The microstructure of the coating is the key factor affecting its service performance,but how to adjust the microstructure of the aluminide coating to obtain a coating with ideal performance is a difficult problem in current research.Aiming at this problem,the effect of temperature,a key preparation parameter,on the microstructure of aluminide coatings was studied in this work.Firstly,aluminide coatings at different deposition temperatures were prepared on the surface of Mar-M247 nickel-based superalloy by chemical vapor deposition(CVD).Then,the microstructure,phase composition and distribution of alloying elements in the aluminide coating were analyzed by scanning electron microscope(SEM),X-ray diffractometer(XRD)and energy spectrum analyzer(EDS).Results showed that the aluminide coatings obtained at different deposition temperatures had a double-layer structure,the outer layer was aβ-NiAl layer rich in Al,and the inner layer was an interdiffusion layer rich in topological close-packed phase(TCP). With the increase of deposition temperature, the thickness of β-NiAl layer and interdiffusion layer increased gradually, and there was a positive correlation between the two and temperature. Moreover, the effect of temperature parameters on the microstructure of aluminide coatings revealed in this study could provide a reference for the preparation of high-performance CVD aluminide coatings.

关 键 词：铝化物涂层 涂层厚度 CVD 沉积温度 

分 类 号：TG1[金属学及工艺—金属学]