基于MEMS的惯性测量组合设计与实现  

Design and Implementation of Inertial Measurement Combination Based on MEMS

作　　者：李旬 李宏[1] 高志勇 余胜义 LI Xun;LI Hong;GAO Zhiyong;YU Shengyi(Beijing Institute of Space Launch Technology,Beijing 100076,China;Unit 93160 of PLA,Beijing 100076,China)

机构地区：[1]北京航天发射技术研究所,北京100076 [2]中国人民解放军93160部队,北京100076

出　　处：《自动化与仪表》2024年第2期126-129,148,共5页Automation & Instrumentation

摘　　要：随着MEMS技术的不断发展与成熟,低成本、安装体积小、中精度的惯性测量组合在实际应用中具有重要价值。该文设计了一种基于MEMS的惯性测量组合,该组合由微机械陀螺、加速度计、电源模块和电路板等组成,利用数字信号处理(digital signal processing,DSP)芯片对微机械陀螺和加速度计的信号进行采集,通过建立误差模型进行误差标定补偿,标定后的组合能够实时对外输出三轴角速度和加速度等传感器信息。经试验验证,该标定方法能够修正惯性测量组合的安装误差,精度指标可以满足实际使用需要。With the continuous development and maturity of MEMS technology,the combination of inertial measurement with low cost,small installation volume and medium accuracy has great value in practical applications.In this paper,a MEMS-based inertial measurement combination is designed,which consists of micromachined gyroscope,accelerometer,power module and circuit board,etc.The digital signal processing(DSP)chip is used to collect the signals of the micro mechanical gyroscope and the accelerometer,and compensates for error calibration by establishing an error model.Using this calibrated combination,sensor information such as triaxial angular velocity and acceleration can be output in real time.After experimental verification,the calibration method can correct the installation error of the inertial measurement combination,and the accuracy index can meet the actual use needs.

关 键 词：微机械陀螺 惯性测量 误差标定 传感器 数字信号处理 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]