基于激光诱导石墨烯的木制惯性测量单元  

Wood Inertial Measurement Unit Based on Laser-induced Graphene

作　　者：李晨 李浩[1] 杨研伟[1] LI Chen;LI Hao;YANG Yanwei(College of Mechanical and Electrical Engineering,Shaanxi University of Science&Technology,Xi′an 710021,China;College of Mechanical Engineering,Xi′an Jiaotong University,Xi′an 710049,China;State Key Laboratory for Manufacturing System Engineering,Xi′an Jiaotong University,Xi′an 710054,China)

机构地区：[1]陕西科技大学机电工程学院,西安710021 [2]西安交通大学机械工程学院,西安710049 [3]西安交通大学精密微纳制造技术全国重点实验室,西安710054

出　　处：《光子学报》2024年第2期150-159,共10页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.52175540,61705124);中国博士后基金面上项目(No.2020M673383);陕西省西安市未央区科技计划(No.202116);陕西省高校青年创新团队计划项目(No.2019);陕西科技大学博士科研启动基金项目(No.2016BJ-78)。

摘　　要：针对商用低精度惯性测量单元具有高成本、制造工艺复杂、废弃后污染环境、不能生物降解等缺点,提出一种低成本、可生物降解的木制惯性测量单元。该设计包含平衡振子和非平衡振子单元,分别用于测量3轴加速度和3轴角加速度。采用激光诱导石墨烯的工艺在木梁上制备应变传感器阵列,并形成多组惠斯顿电桥测量电路。结果表明:加速度方面,X轴灵敏度为0.006 m V/g,Y轴灵敏度为8.695×10^(-4)m V/g,Z轴灵敏度为0.200 m V/g;角加速度方面,X轴灵敏度为0.285 m V/(rad/s^(2)),绕Y轴旋转的灵敏度为0.305 m V/(rad/s^(2)),绕Z轴旋转的灵敏度为0.765 m V/(rad/s^(2))。与有限单元法仿真结果对比,实验测量误差在10%以内,且具有良好的重复测量精度。该惯性测量单元在木制船舶、木制载具、木制家具等方面具有潜在的应用前景。Inertial Measurement Unit(IMU)mainly measures and reports the specific force and angular velocity of an object.It usually consists of a three-axis accelerometer and a three-axis gyroscope.Traditional IMU have complex manufacturing processes and high costs.It is not easy to recycle,pollute the environment and cannot be biodegradable after being discarded.In this study,a kind of wood inertial measurement unit based on Laser-induced Graphene(LIG)is proposed.Camphor pine wood was selected as the sensor frame.The pine is placed in the vacuum chamber and adjust the vacuum degree in the vacuum chamber.Fiber laser and laser vibrators software was used to process LIG resistors at the pine frame resistor locations by adjusting laser frequency,laser power,scan speed,off-focus distance and other parameters,with a resistance value of about 100Ω,and to connect these resistors into multiple Wheatstone bridges.Due to the sensor's design being symmetrical along the X-and Z-axes,only the Wheatstone bridge on the beam in the X-or Z-axis direction needs to be measured.Different inertial bodies are divided into balanced oscillator unit and unbalanced oscillator unit.The inertial body of the balanced oscillator unit is a spherical inertial body(Cr13),mainly measuring acceleration;The inertial body of the unbalanced dipole element is the inertial wheel(PLA),which mainly measures the angular acceleration.The theoretical formula shows that the acceleration range of IMU along X axis and Z axis is±10 g,the acceleration range along Y axis is−g~+3 g,the angular acceleration range around X axis and Z axis is±8 rad/s^(2),and the angular acceleration range around Y axis is±23 rad/s^(2).The product of this study is placed on a sports platform and uses a dynamic signal acquisition system to collect the output voltage of a Wheatstone bridge in the IMU.Through the joint test and comparison of the commercial acceleration sensor and unbalanced oscillator unit,it can be concluded that the designed sensor has the same change as the commercial sen

关 键 词：惯性测量单元 激光诱导石墨烯 陀螺仪 加速度计 木材 

分 类 号：TH703[机械工程—仪器科学与技术] V261.8[机械工程—精密仪器及机械]