等离子体增强磁控溅射TiN涂层与铝对摩时的摩擦磨损行为  

Tribological Behavior of TiN Coatings Deposited by Plasma-enhanced Magnetron Sputtering Against Aluminum

作　　者：谢启[1,2] 柳子怡 付志强 康嘉杰[1,2] 朱丽娜 佘丁顺[1,2] XIE Qi;LIU Ziyi;FU Zhiqiang;KANG Jiajie;ZHU Lina;SHE Dingshun(School of Engineering and Technology,China University of Geosciences(Beijing),Beijing 100083,China;Zhengzhou Institute,China University of Geosciences(Beijing),Zhengzhou 451283,China)

机构地区：[1]中国地质大学(北京)工程技术学院,北京100083 [2]中国地质大学(北京)郑州研究院,郑州451283

出　　处：《中国表面工程》2023年第6期68-78,共11页China Surface Engineering

基　　金：国家自然科学基金资助项目(52175196,51775524)。

摘　　要：铝挤压模具表面的摩擦磨损行为是影响铝制品质量和模具寿命的重要因素。为了进一步优化铝挤压模具表面耐磨涂层的沉积工艺,以TiN涂层为例,采用等离子体增强磁控溅射方法分别在基体偏流为0.1 A、1.5 A、3.0 A和4.5 A条件下制备TiN涂层,利用XPS、SEM、AFM和XRD分别测量TiN涂层的化学成分、表截面微观结构和相组成,利用纳米压痕仪和旋转式球-盘摩擦磨损试验机分别考察TiN涂层试样的综合力学性能和与铝对摩时的摩擦磨损行为。结果表明:基体偏流增加对TiN涂层的化学组成影响较小。随着基体偏流的增加,TiN涂层的横截面形貌逐渐细化。涂层表面具有由岛状微凸起组成的微结构,随着基体偏流的增加,微凸起尺寸和数量逐渐减小,表面粗糙度逐渐降低。不同基体偏流条件下制备的涂层均具有明显的TiN(111)择优生长趋势。当基体偏流从0.1 A增加到1.5 A时,TiN涂层的晶粒尺寸明显减小,涂层的综合力学性能得到显著提高。TiN涂层试样与铝对摩过程中主要发生粘着磨损和磨料磨损,涂层试样对铝的减摩抗磨性能与对摩过程中的铝粘着面积呈负相关。结论:基体偏流对等离子体增强磁控溅射TiN涂层的表截面微观结构、力学性能和摩擦磨损行为影响显著,基体偏流为1.5 A时制备的TiN涂层具有最低的摩擦因数和磨损率,分别为0.41×10^(-15)和3.03×10^(-15)m~3/(N·m)。研究结果对铝成型模具表面高性能长寿命防护涂层的研究开发具有一定的理论意义和实用价值。The friction and wear performances of aluminum extrusion die surfaces are important factors affecting the quality of aluminum or aluminum alloy products and the life of extrusion dies.The deposition of wear-resistant films on the surface of extraction dies is one of the most effective strategies,and the friction and wear performances of different coatings against aluminum have been previously investigated.However,studies regarding the influence of the coating microstructure on the tribological behavior of the same coating material when applied against aluminum remain limited.Plasma-enhanced magnetron sputtering introduces an extra electron-emitting source into conventional magnetron sputtering equipment to obtain a densified and controllable plasma around the substrates,producing wear-resistant coatings with similar compositions but significantly different microstructures.The TiN coating,which is a widely used wear-resistant coating,is selected as an example and deposited by plasma-enhanced magnetron sputtering at various substrate bias currents to obtain coatings with different microstructures.The effect of the substrate bias current on the microstructure,mechanical properties,and tribological behavior of the TiN coatings against aluminum is systematically investigated to further optimize the deposition process of the wear-resistant TiN coating applied on aluminum extrusion dies.The TiN coating is prepared using plasma-enhanced magnetron sputtering under varied substrate bias currents of 0.1 A,1.5 A,3.0 A,and 4.5 A.The chemical compositions of the TiN coatings are analyzed using X-ray photoelectron spectroscopy(XPS).The surface and cross-sectional morphologies of the coatings are observed using scanning electron microscopy(SEM).The 3D surface microstructure and surface roughness of the coatings are studied using atomic force microscopy(AFM).The phase structures of the coatings are determined using X-ray diffraction(XRD).The comprehensive mechanical properties and tribological behavior of the TiN-coated samples a

关 键 词：磁控溅射 涂层 微观组织 摩擦学 挤压 

分 类 号：TG156[金属学及工艺—热处理] TB43[金属学及工艺—金属学]