超洁净磁悬浮针阀设计与仿真优化  

Design of Ultra Clean Maglev Needle Valve and Optimization

作　　者：龚轩 刘明潇 胡亮[1] 阮晓东[1] 苏芮 傅新[1] GONG Xuan;LIU Ming-xiao;HU Liang;RUAN Xiao-dong;SU Rui;FU Xin(School of Mechanical Engineering,Zhejiang University,Hangzhou,Zhejiang 310058)

机构地区：[1]浙江大学机械工程学院,浙江杭州310058

出　　处：《液压与气动》2023年第12期34-40,共7页Chinese Hydraulics & Pneumatics

基　　金：国家自然科学基金(52075475);浙江省“尖兵”“领雁”研发攻关计划(2023C01015)。

摘　　要：为了满足半导体加工等行业的超洁净流控要求,设计了一种超洁净磁悬浮针阀。超洁净磁悬浮针阀以超洁净氟塑料裹覆永磁体为阀芯,以电磁铁为外部驱动,利用磁悬浮原理实现阀芯的无接触控制。阐述了该磁悬浮针阀的工作原理,通过仿真计算,提出电磁铁的设计方案,对电磁铁的线圈和铁芯进行优化,为阀的力学性能和尺寸特征优化提供了方法指导,并针对阀芯受到的径向力和轴向力进行了分析,验证了方案的可行性。An ultra-clean maglev needle valve was designed to meet the high requirements for ultra-clean flow control in the semiconductor industry.An ultra-clean valve poppet enfolding the permanent magnet(PM)was developed and coated with ultra-clean fluoropolymers,and it is controlled by the external control system consisting of the suspension coil and iron core via a contactless method.In this paper,the principle of the maglev valve was first described.Then the coil turns and iron core of the drive-suspension system were optimized based on the simulation results of mechanical properties,which provides methodological guidance for optimizing of the mechanical properties and dimensional characteristics of the valve.Furthermore,the radial and axial forces of the magnetic system on the valve poppet under different offsets were calculated.The mechanical properties of the valve poppet were analyzed to verify the design scheme of the maglev valve.

关 键 词：半导体 超洁净 针阀 磁悬浮 

分 类 号：TH137[机械工程—机械制造及自动化]