压阻式加速度传感器动力学响应分析与验证  

Analysis and verification of dynamic response of piezoresistive acceleration sensor

作　　者：张洁宇 石云波[1] 赵锐[1] 闫晓朋 Zhang Jieyu;Shi Yunbo;Zhao Rui;Yan Xiaopeng(Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Shanxi Taiyuan,030051,China;Shanxi North Machinery Manufacturing Co.,Ltd.,Shanxi Taiyuan,030013,China)

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]山西北方机械制造有限责任公司,山西太原030013

出　　处：《机械设计与制造工程》2024年第2期114-118,共5页Machine Design and Manufacturing Engineering

基　　金：山西省基础研究计划面上项目(202103021224206)。

摘　　要：面向极端环境下压阻式加速度传感器的冲击动力学响应特性分析的需求,对其封装体结构建立多自由度动力学响应模型,利用矢量法并结合MATLAB软件进行数值求解,获得其敏感结构位移响应曲线,与霍普金森杆实测结果对比,表明该响应模型可有效表征受迫振动中加速度传感器敏感结构的动力学响应过程,为MEMS高量程加速度传感器的优化设计提供理论参考。In order to analyze the impact dynamic response characteristics of the piezoresistive acceleration sensor in extreme environment,the multi-degree of freedom dynamic response model of the package structure is established.The vector method and MATLAB software are used to solve the numerical solution,and the displacement response curve of the sensitive structure is obtained,which is compared with the measured results of the Hopkinson bar.The results show that the response model can effectively characterize the dynamic response process of the sensitive structure of the acceleration sensor in the forced vibration,and provide theoretical reference for the optimal design of MEMS high range acceleration sensor.

关 键 词：加速度传感器 封装体 动力学响应 多自由度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O342[自动化与计算机技术—控制科学与工程] TH113[理学—固体力学]