太赫兹多层平面透镜天线的分层制造技术研究  

Research on Layered Manufacturing Technology of Terahertz Multilayer Planar Transmit-array Antenna

作　　者：刘振浩 邹小舟 缪卓伟 胡孝昀[1] 曾永彬[1] Liu Zhenhao;Zou Xiaozhou;Miao Zhuowei;Hu Xiaoyun;Zeng Yongbin(Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;AVIC Nanjing Servo Control System Co.,Ltd.,Nanjing 210032,China;Southeast University,Nanjing 210096,China)

机构地区：[1]南京航空航天大学,江苏南京210016 [2]中航工业南京伺服控制系统有限公司,江苏南京210032 [3]东南大学,江苏南京210096

出　　处：《航空科学技术》2024年第1期115-124,共10页Aeronautical Science & Technology

基　　金：航空科学基金(201907052002)。

摘　　要：现代信息科技的飞速发展对雷达系统提出了更高的要求,太赫兹(THz)雷达凭借其特殊的电磁特性在航空航天军事应用方面有着广阔的应用前景。高增益天线作为雷达系统的关键组成部分,在太赫兹波段的研究正受到高度关注。当天线工作频段高达1.0THz左右时,适用于低频器件的常规加工方法往往难以满足设计需求,限制了其进一步应用。本文提出并设计了一种基于UV-LIGA工艺的太赫兹多层平面透镜天线的分层制造方法,为提高透镜区域厚度均匀性,在外缘添加了片内辅助阴极作为装配区,经验证,厚度均匀性提高了33.08%。开展阶梯式电流密度电铸试验,当电流密度按1.5A/dm2、2A/dm2、1.75A/dm2阶梯变化时得到的沉积层具有更低的结合强度和表面粗糙度。透镜天线经过电性能测试,其在0.79~1.03THz范围内取得了良好的增益效果,有望应用于航空航天机载平台以提高雷达系统的识别能力。The rapid development of modern information technology has put forward higher requirements for radar systems,and terahertz(THz)radar has broad prospects in aerospace military applications due to its special electromagnetic advantages.As a key component of radar systems,high-gain antennas are receiving high attention in the terahertz band.When the frequency band reaches about 1.0THz,conventional processing methods suitable for low frequency devices often fail to meet design requirements,which limits their further application.This paper proposes a layered manufacturing method for terahertz transmit-array antenna(TA)based on UV-LIGA technology.In order to improve the thickness uniformity of the transmission area and facilitate subsequent assembly,the in-chip auxiliary cathode was added as an assembly area on its outer edge.Experimental verification shows that its thickness uniformity has increased by 33.08%.During the step current density electroforming experiment,when the cathode current density is 1.5A/dm2,2A/dm2,1.75A/dm2,the electroformed structure has moderate bonding strength and low surface roughness.Through the TA's wireless communication testing,the TA prototype achieves good gain in the range of 0.79THz and 1.03THz.It is expected to be applied to aerospace platforms to improve radar system recognition capabilities.

关 键 词：UV-LIGA 透镜天线 太赫兹雷达 分层制造 微电铸 

分 类 号：TN802[电子电信—信息与通信工程]