压电变形镜驱动器迟滞快速辨识与补偿研究  

Research on Rapid Identification and Compensation of Hysteresis in Piezoelectric Deformable Mirror Actuators

作　　者：汪寒 肖习 郭友明[1] 黄林海[1] 鲜浩[1] WANG Han;XIAO Xi;GUO Youming;HUANG Linhai;XIAN Hao(Institute of Optics and Electronics,Chinese Academy of Sciences,The Key Laboratory on Adaptive Optics,Chengdu 610209,China)

机构地区：[1]中国科学院光电技术研究所自适应光学重点实验室,四川成都610209

出　　处：《压电与声光》2024年第1期67-72,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金项目(面上项目,重点项目,重大项目);中国科学院青年创新促进会资助项目;中国科学院光电技术研究所前沿部署项目。

摘　　要：采用压电陶瓷作为促动机构的主动光学系统。为了对压电陶瓷驱动器固有的迟滞非线性进行有效抑制校正,以提高系统性能,该文对带变形镜镜面负载结构的压电陶瓷驱动器非线性迟滞动态进行了高效辨识建模,实现了带镜面负载的压电陶瓷驱动器相对误差1.8867%的迟滞参数辨识与建模,降低了辨识算法所需时间90%以上,同时克服了负载结构导致辨识信号信噪比低的问题。实验证明,所用方法得到的压电陶瓷迟滞模型能够有效地用于补偿校正压电陶瓷驱动器迟滞非线性动态带来的误差,通过前馈控制器可将压电陶瓷驱动器迟滞引起的镜面面形定位误差降低56.21%,有效地提升了系统性能。In the context of active optical systems employing piezoelectric actuators as actuation mechanisms,effectively modeling and correcting the inherent hysteresis nonlinearity in piezoelectric actuators is essential for enhancing system performance.The paper presents an efficient identification and modeling approach for the nonlinear hysteresis dynamics of piezoelectric actuators with deformable mirror loads.The proposed method was successfully applied in the identification and modeling of hysteresis for piezoelectric actuators with mirror loads,reducing the runtime of the identification algorithm by over 90%with a relative error less than 1.8867%.Furthermore,this approach overcomes the challenge of low signal-to-noise ratio resulting from the structure.Experimental results demonstrate that the piezoelectric hysteresis model obtained through this methodology can effectively compensate for and correct errors induced by the dynamic hysteresis nonlinearity of piezoelectric actuators.By utilizing a feedforward controller,the mirror surface positioning errors caused by piezoelectric hysteresis are reduced by 56.21%,significantly enhancing overall system performance.

关 键 词：压电陶瓷驱动器 主动光学 PREISACH模型 迟滞补偿 前馈控制 

分 类 号：TN384[电子电信—物理电子学] TP273.3[自动化与计算机技术—检测技术与自动化装置]