基于单目视觉与激光源倾置的微位移测量系统研究  

Research on micro-displacement measurement system based on monocular vision and laser source tilt placement

作　　者：游志刚 朱兴龙[1] 尹珺瑶 YOU Zhigang;ZHU Xinglong;YIN Junyao(School of Mechanical Engineering,Yangzhou University,Yangzhou 225127,China;School of Mechanical Engineering,Southeast University,Nanjing 211189,China)

机构地区：[1]扬州大学机械工程学院,江苏扬州225127 [2]东南大学机械工程学院,江苏南京211189

出　　处：《传感器与微系统》2024年第4期49-52,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金面上资助项目(51475409);江苏省自然科学基金面上资助项目(BK20171287)。

摘　　要：设计了一种基于单目视觉与激光源倾置的微位移测量系统。首先,根据系统的测量原理,建立了斑点图像中心坐标值与微位移之间的关系,并得出了斑点图像中心坐标值是由纵向位变与切向位变组成的;其次,通过实验发现,当微位移变化较小时,切向位变对斑点图像中心坐标值的影响较大;然后,通过标定实验建立以切向位变为主导的测量函数模型;最后,对该测量函数模型进行了实验验证,并对测量误差进行了分析。实验结果表明:在0~1 mm的位移测量范围内,采用标定的测量函数模型对物体微位移进行测量的最大绝对误差为1.16μm,满足系统测量精度的要求。A micro-displacement measurement system based on monocular vision and laser source tilt placement is designed.Firstly,the relationship between the central coordinate value of speckle image and the micro-displacement is established according to the measurement principle of the system,and it is concluded that the center coordinate value of the speckle image is composed of the longitudinal position variation and the tangential position variation.Secondly,the experimental results show that when the micro-displacement changes are small,the tangential position variation has a great influence on the central coordinate value of the speckle image.Then the measurement function model dominated by tangential position variation is established through calibration experiments.Finally,the measurement function model is verified by experiment,and the measurement error is analyzed.The experimental results show that in the displacement measurement range of 0~1 mm,the maximum absolute error of measuring micro-displacement of the object using the calibrated measurement function model is 1.16μm,which meets the requirements of the system measurement precision.

关 键 词：单目视觉 激光源倾置 微位移测量 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术]