微纳陶瓷基铂铑10-铂热电偶技术研究  

Research on technologies of micro-nano ceramic-based platinum rhodium 10-platinum thermocouple

作　　者：张洪泉 邢会明 王辉[1] 单国柱 罗嘉琪 ZHANG Hongquan;XING Huiming;WANG Hui;SHAN Guozhu;LUO Jiaqi(College of Intelligent Science and Engineering,Harbin Engineering University,Harbin 150001,China;Sanya Innovation and Development Center,Harbin Engineering University,Sanya 572024,China)

机构地区：[1]哈尔滨工程大学智能科学与工程学院,黑龙江哈尔滨150001 [2]哈尔滨工程大学三亚南海创新发展基地,海南三亚572024

出　　处：《传感器与微系统》2024年第4期64-67,共4页Transducer and Microsystem Technologies

基　　金：黑龙江省重点研发计划资助项目(GA21A301);海南省自然科学基金联合资助项目(2021JJLH0019);国家自然科学基金资助项目(62071138);哈尔滨市科技计划自筹经费资助项目(2022ZCZJCG003);黑龙江省重大科技成果转化项目(CG23006)。

摘　　要：针对燃气轮机温度检测高温热电偶存在的热容大、响应时间慢、无法表贴安装等诸多技术问题,利用陶瓷微纳加工技术制造出50μm厚度的柔性芯片基底,经薄膜工艺形成冗余结构的铂铑10-铂热电偶电极,通过“三明治”封装形成全陶瓷密封型热电偶,开展微纳陶瓷基高温热电偶性能与功能试验。试验表明,所设计的微纳陶瓷基高温热电偶具有快响应特点,能实现在圆滑表面进行柔性表贴安装,在0~1 000℃温度范围内,热电偶输出灵敏度与二级标准铂铑10-铂热电偶比对,偏差在±0.3%,90%响应时间优于0.1 s,热电偶具有良好的高温稳定性。Aiming at the technical problems of high temperature thermocouple in gas turbine temperature detection,such as large heat capacity,slow response time and inability to mount on the surface,a flexible chip substrate of 50μm thickness is manufactured by ceramic micro-nano processing technology,and a platinum rhodium 10-platinum thermocouple electrode is with redundant structure formed by thin film process,and an all-ceramic sealed thermocouple is formed by sandwich packaging.The performance and function tests of micro-nano ceramic based high temperature thermocouple are carried out.The experiments show that the designed micro-nano ceramic based high temperature thermocouple has the characteristics of fast response,and can achieve the flexible surface mounting on the smooth surface.In the temperature range of 0~1000℃,the output sensitivity of the thermocouple is compared with that of the secondary standard platinum rhodium 10-platinum thermocouple,the deviation is within±0.3%,and the response time of 90%is better than 0.1 s.The thermocouple has good high-temperature stability.

关 键 词：微纳加工 热电偶 快响应 冗余 柔性 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]