Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators  

作　　者：Shuai Shi Qingrui Yang Yi Yuan Haolin Li Pengfei Niu Wenlan Guo Chen Sun Wei Pang 

机构地区：[1]State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China

出　　处：《Nanotechnology and Precision Engineering》2024年第1期32-43,共12页纳米技术与精密工程（英文）

基　　金：supported in part by the National Key Research and Development Program of China(Grant No.2020YFB2008800);in part by the Nanchang Institute for Microtechnology of Tianjin University.

摘　　要：This paper presents the design,fabrication,and characterization of cantilever-type resonators with a novel stacked structure.Aluminum nitride is adopted as the material for both the structural layer and the piezoelectric layer;this simplifies the fabrication process and improves the quality factor of the resonator.Both in-plane and out-of-planeflexural modes were investigated.The effect of the structural dimensions and electrode patterns on the resonator’s performance were also studied.Finite-element simulations and experiments examining anchor loss and thermoelastic damping,which are the main loss mechanisms affecting the quality factor of these resonators,were carried out.The optimal structural dimensions and electrode patterns of the cantilever-type resonators are presented.A quality factor of 7922 with a motional impedance of 88.52 kΩand a quality factor of 8851 with a motional impedance of 67.03 kΩwere achieved for the in-plane and out-of-planeflexural-mode resonators,respectively.The proposed resonator design will contribute to the development of high-performance devices such as accelerometers,gyroscopes,and pressure sensors.

关 键 词：MEMS Cantilever-type micro-resonator ALN Finite-element simulation 

分 类 号：TN751.2[电子电信—电路与系统]