2~10μm台阶高度标准物质候选物的研制和质量评价  

Fabrication and Quality Evaluation of 2~10 μm Step Height Reference Material Candidates

作　　者：柳迪 王琛英[2,3] 张雅馨 王云祥 王松 陈伦涛 王永录 朱楠 蒋庄德[1,3] LIU Di;WANG Chenying;ZHANG Yaxin;WANG Yunxiang;WANG Song;CHEN Luntao;WANG Yonglu;ZHU Nan;JIANG Zhuangde(School of Mechanical Engineering,Xi′an Jiaotong University,Xi′an,Shaanxi 710049,China;School of Instrument Science and Technology,Xi′an Jiaotong University,Xi′an,Shaanxi 710049,China;State Key Laboratory for Manufacturing Systems Engineering,Xi′an Jiaotong University,Xi′an,Shaanxi 710049,China;Suzhou Institute of Metrology,Suzhou,Jiangsu 215128,China)

机构地区：[1]西安交通大学机械工程学院,陕西西安710049 [2]西安交通大学仪器科学与技术学院,陕西西安710049 [3]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [4]苏州计量测试院,江苏苏州215128

出　　处：《计量学报》2024年第3期305-310,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金(52175354)。

摘　　要：微米台阶高度标准物质用于校准仪器z轴性能,传递准确的微米高度量值。利用光刻结合干法刻蚀工艺实现公称高度为2,5,10μm台阶高度标准物质候选物的制备,并对台阶高度、粗糙度和上下表面平行度进行表征。使用激光共聚焦显微镜和非球面测量仪进行测量,基于双边算法、直方图法、ISO算法和光学显微解耦合准则(LEL)法对台阶高度进行评定,对于同一标准物质候选物各评定方法间的标准差均不超过0.024μm,台阶高度评定值的相对偏差均在5%以内,表明不同算法的评定结果一致性水平较高且量值可靠;不同仪器的评定结果对比,说明了评定方法之间也具有良好的一致性;同时,粗糙度不超过0.04μm,上下表面平行度不超过0.03°,验证了标准物质候选物制备效果良好。The micrometer step height reference materials can used to calibrate the z-axis performance of the instrument and transmit accurate micrometer height values.The step height reference material candidates with 2,5,10 μm nominal size are prepared by photolithography combined with dry etching.The height,roughness,and parallelism of the steps are characterized.Using a laser confocal microscope and an aspheric measuring instrument for measurement,the step height is evaluated based on the bilateral algorithm,histogram method,ISO algorithm,and the decoupling criterion for optical microscopy method.For the same reference material candidates,the standard deviation between each evaluation method does not exceed 0.024 μm.Moreover,the relative deviation of the step height evaluation values is within 5%.This indicates that the evaluation results obtained using different algorithms and instruments have a high level of consistency and reliable measurement values.The comparison of evaluation results from different instruments indicates that the evaluation methods also have good consistency.Meanwhile,the roughness does not exceed 0.04 μm.The parallelism of the upper and lower surfaces does not exceed 0.03°,which verifies the good preparation effect of the reference material candidates.

关 键 词：微米计量 台阶高度标准物质 干法刻蚀 粗糙度 平行度 

分 类 号：TB92[一般工业技术—计量学]