基于曲面拟合的光学偏折系统显示屏标定方法  

Calibration Method for Optical Deflection System Display Screen Based on Surface Fitting

作　　者：郭创为 管钰晴 沈瑶琼[1,2] 徐瑞书 朱言瑧 刘丽琴 张玉杰 雷李华 傅云霞[1,2] GUO Chuangwei;GUAN Yuqing;SHEN Yaoqiong;XU Ruishu;ZHU Yanzhen;LIU Liqin;ZHANG Yujie;LEI Lihua;FU Yunxia(Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China;Shanghai Key Laboratory of Online Test and Control Technology,Shanghai 201203,China)

机构地区：[1]上海市计量测试技术研究院,上海201203 [2]上海市在线检测与控制技术重点实验室,上海201203

出　　处：《计量学报》2024年第3期419-424,共6页Acta Metrologica Sinica

基　　金：上海市自然科学基金(21ZR1483100)。

摘　　要：针对透射式光学偏折系统中最关键的标定环节,提出使用曲面拟合方式拟合显示屏幕面形分布。建立基于透射式光学偏折术的波前检测仿真模型,分析两种不同的显示屏面形拟合方法对波前测量的影响。仿真结果显示:平面屏幕模型波前像差均方根误差(RMS)值为0.8375μm,而曲面屏幕模型仿真波前像差RMS值仅为0.0596μm。采用透射式光学偏折系统对球面透镜进行波前测量,曲面屏幕模型中波前像差RMS值为0.1371μm,平面屏幕模型中波前像差RMS值为1.4326μm。实验结果表明:使用曲面拟合效果明显优于平面拟合效果,证明了曲面拟合屏幕模型的可行性。A surface fitting method is proposed to fit the surface shape distribution of the display screen,which is the most critical calibration step in the transmission optical deflection system.A wavefront detection simulation model based on transmission optical deflection technique is established,and the impact of two different display screen surface fitting methods on wavefront measurement is analyzed.The simulation results show that the root mean square error(RMS) of the wavefront aberration of the planar screen model is 0.837 5 μm.The RMS value of the simulated wavefront aberration of the curved screen model is only 0.059 6 μm.Using a transmissive optical deflection system for wavefront measurement of spherical lenses,the RMS value of wavefront aberration in the curved screen model is 0.137 1 μm.The RMS value of wavefront aberration in the flat screen model is 1.432 6 μm.The experimental results show that the use of surface fitting is significantly better than plane fitting,confirming the feasibility of surface fitting screen models.

关 键 词：光学计量 透射式光学偏折术 显示屏标定 波前测量 曲面拟合 

分 类 号：TB96[机械工程—光学工程]