基于PSD的分离式长导轨直线度测量方法研究  

Research on PSD-based Straightness Measurement Method of Separated Long Guide Rail

作　　者：金挺[1,2] 朱进 陈挺 郭斌[1,2] 沈斌 孔明[4] 程银宝 王瑛辉 JIN Ting;ZHU Jin;CHEN Ting;GUO Bin;SHEN Bin;KONG Ming;CHENG Yinbao;WANG Yinghui(Zhejiang Institute of Metrology,Hangzhou,Zhejiang 310018,China;Key Laboratory of Digital Precision Measurement Technology of Zhejiang Province,Hangzhou,Zhejiang 310018,China;Hangzhou Optical-Ruler Technology Co.,Ltd.,Hangzhou,Zhejiang 310018,China;China Jiliang University,Hangzhou,Zhejiang 310018,China)

机构地区：[1]浙江省计量科学研究院,浙江杭州310018 [2]浙江省数字精密测量技术研究重点实验室,浙江杭州310018 [3]杭州光尺科技有限公司,浙江杭州310018 [4]中国计量大学,浙江杭州310018

出　　处：《计量学报》2024年第3期425-432,共8页Acta Metrologica Sinica

基　　金：浙江省科技厅“尖兵”“领雁”研发攻关计划(2022C01139)。

摘　　要：利用分段拼接测量方法能够将PSD激光准直测量系统测量范围扩大,相较于传统长导轨直线度测量方法,该方法可同时适用于连续型导轨和分离式超长导轨的直线度测量。首先,在(-5~+5) mm测量范围内,通过激光干涉仪分别测得激光准直测量系统的接收靶在水平和竖直方向上的位移,误差均优于±(1μm+1%H)。然后,在40 m范围内与激光准直测量系统的直线度测量精度进行对比,二者水平方向直线度误差相差0.06 mm,竖直方向直线度误差相差0.13 mm。最后,在70 m分离式超长导轨上,测得水平方向直线度为0.50 mm,竖直方向直线度为0.53 mm。该方法可迅速定位和调整直线度误差极值点位置,能够较为有效地解决分离式超长导轨的直线度装配调试问题。The measuring range of the PSD-laser collimation measuring system can be expanded by using the piecewise splicing measurement method.Compared with the traditional method of measuring the straightness of long guide rails,the mentioned method can be used to measure the straightness of both continuous guide rails and separated super-long guide rails.Firstly,in the measuring range of(-5~+5) mm,the horizontal and vertical displacements of the receiving target of the laser collimation measurement system are respectively measured by the laser interferometer,and the errors are better than ±(1 μm+1%H).Then,the straightness measurement accuracy is compared with that of the laser collimation measurement system in the range of 40 m.The deviation of straightness in the horizontal direction is 0.06 mm,and the deviation of straightness in the vertical direction is 0.13 mm.Finally,the horizontal straightness is 0.50 mm and the vertical straightness is 0.53 mm on the 70 m separated ultra-long guide rail.The method can quickly locate and adjust the position of the extreme point of straightness error,and can effectively solve the problem of straightness assembly and debugging of separated ultra-long guide rails.

关 键 词：几何量计量 超长导轨 直线度 拼接方法 最小二乘 

分 类 号：TB921[一般工业技术—计量学]