基于浮动坐标法的刚柔耦合定位平台力学模型  

Mechanical model of rigid⁃flexible coupling positioning stage based on floating coordinate method

作　　者：杨志军[1] 张驰[1] 黄观新 YANG Zhi-jun;ZHANG Chi;HUANG Guan-xin(State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学省部共建精密电子制造技术与装备国家重点实验室,广州510006

出　　处：《吉林大学学报（工学版）》2024年第2期385-393,共9页Journal of Jilin University:Engineering and Technology Edition

基　　金：国家自然科学基金项目(51875108,51905107);广东省自然科学基金项目(2019A1515012)。

摘　　要：精密定位平台由于机械摩擦造成精度受限,难以满足大行程、高精度定位的运动要求。本文结合宏微复合结构,提出了一种单驱动刚柔耦合定位平台。相对于现有的宏微复合平台,大幅简化了机械结构和运动控制系统的设计。基于浮动坐标法和有限元法建立了单驱动刚柔耦合定位平台的静力学和动力学模型,并与商业软件ABAQUS及简化解析模型的分析结果进行对比,最大相对误差分别为1.6%和3.72%,证明了该理论模型具有较高的预测精度,可为刚柔耦合平台的优化设计及精密运动控制提供参考。The precision of traditional precision positioning stages are limited due to mechanical friction,so it is difficult to meet the motion requirements of large stroke and high precision.In this paper,a single drive rigid-flexible coupling positioning stage combined with macro-micro composite structure was proposed.Compared with the other macro-micro composite stage,it greatly simplified the design of mechanical structure and motion control system.Based on the floating coordinate method and finite element method,the static and dynamic model of the single drive rigid-flexible coupling positioning stage was established.The analysis results of these models were compared with the static analysis results of ABAQUS finite element software and the analytical solution of the simplified dynamic model,the maximum relative errors were 1.6%and 3.72%respectively.It is proved that this theoretical model has high prediction accuracy,which can provide parameters for the optimal design and precision motion control of the single drive rigid-flexible coupling stage.

关 键 词：机械工程 刚柔耦合动力学 有限元分析 柔性铰链 定位平台 

分 类 号：TH113.1[机械工程—机械设计及理论]