基于模糊解耦的坩埚下降法晶体生长炉温度控制系统  

Temperature Control System of Crystal Growth Furnace with Bridgman-stockbarger Method Based on Fuzzy Decoupling

作　　者：陈祥烨 王森林 陈豪[2] CHEN Xiangye;WANG Senlin;CHEN Hao(College of Electrical Engineering and Automation,Fuzhou University,Fuzhou 350000,China;Quanzhou Institute of Equipment Manufacturing Haixi Institutes,Chinese Academy of Sciences,Quanzhou 362000,China)

机构地区：[1]福州大学电气工程与自动化学院,福州350000 [2]中国科学院海西研究院泉州装备制造研究中心,泉州362000

出　　处：《自动化与仪表》2024年第4期37-41,共5页Automation & Instrumentation

基　　金：福建省科技计划项目(2021T3022)。

摘　　要：针对坩埚下降法晶体生长炉温度控制系统存在的非线性、滞后性、多温区耦合性等问题。设计了模糊解耦控制器来对生长炉上、下两个温区的温度进行控制,该控制器能够根据上、下温区的实时温度误差以及温度误差变化率,调节两个温区加热棒的功率。与传统解耦和PID算法相比,该方法具有不依赖被控对象的精确数学模型,计算量小,算法设计简单等特点。通过仿真将该方法分别与传统PID算法和传统解耦PID算法进行比较,仿真结果表明,该方法具有很好的动态性能、解耦能力和鲁棒性,有利于提升晶体生长炉的控温精度和加热效率。Aiming at the problems of non-linearity,hysteresis and multi-temperature coupling in the temperature control system of crystal growth furnace with crucible lowering method.A fuzzy decoupling controller is designed to control the temperature of the upper and lower temperature zones of the growth furnace.The controller can adjust the power of the heating rods in the two temperature zones according to the real-time temperature error and the change rate of temperature error.Compared with the traditional decoupling and PID algorithms,this method has the advantages of precise mathematical model independent of the controlled object,less computation and simple algorithm design.Through simulation,the proposed method is compared with the traditional PID algorithm and the traditional decoupling PID algorithm respectively.The simulation results show that the proposed method has good dynamic performance,decoupling ability and robustness,which is conducive to improving the temperature control accuracy and heating efficiency of the crystal growth furnace.

关 键 词：坩埚下降法 晶体生长炉 多温区耦合系统 解耦控制 模糊控制 

分 类 号：TP27[自动化与计算机技术—检测技术与自动化装置]