基于矢量衍射理论的光栅干涉仪位移测量误差研究  

Displacement measurement error of grating interferometer based on vector diffraction theory

作　　者：雷李华[1,2] 张玉杰 傅云霞 Lei Lihua;Zhang Yujie;Fu Yunxia(Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China;Shanghai Key Laboratory of Online Test and Control Technology,Shanghai 201203,China)

机构地区：[1]上海市计量测试技术研究院,上海201203 [2]上海市在线检测与控制技术重点实验室,上海201203

出　　处：《红外与激光工程》2024年第2期90-97,共8页Infrared and Laser Engineering

基　　金：上海市自然科学基金项目(21ZR1483100);上海市优秀学术/技术带头人计划项目(21XD1425000)。

摘　　要：光栅干涉仪位移测量系统作为测量领域中最精密的测量仪器之一,由于在测量过程中光栅的姿态位置无法保证完美装配,使得光栅的光栅矢量方向与运动矢量方向之间出现偏差,导致位移测量结果出现周期性非线性误差。文中针对在光栅干涉仪位移测量过程中出现的光栅与位移台以及读数头之间的姿态位置误差进行分析,通过分别建立位移坐标系及光栅坐标系,参考惯性导航领域中飞行器姿态表示方法,利用一维光栅的横滚、俯仰和偏航角共同描述一维光栅相对于位移台的装配状态。通过基于矢量衍射理论分析光栅干涉仪位移测量时三个维度的角度偏差量,对可能产生的位移测量误差进行了分析说明。基于广义一维光栅方程,探究出了一个更为普遍的结论,为后续装置的改进提供理论依据,以提高系统的测量精度。Objective The grating interferometer displacement measurement system,as one of the most precise measuring instruments in the measurement field,is not able to ensure the perfect assembly of the grating's attitude position during the measurement process,which makes the deviation between the grating's grating vector direction and the motion vector direction,leading to the periodic nonlinear error in the displacement measurement results.In previous studies,the assembly error of grating displacement measurement system is usually unfolded in the scalar state,ignoring the effect of incident azimuth angle on the system.Based on the grating vector diffraction theory,this paper analyses the attitude position error between the grating and the displacement stage as well as the readhead that occurs during the displacement measurement of the grating interferometer,and illustrates the possible displacement measurement error by analysing the amount of angular deviation of the three dimensions,so as to provide the theoretical basis for the improvement of the subsequent device.Methods Ideally,the displacement measurement of a grating interferometer is based on the period of the core component,the grating.But due to the non-ideal assembly of the grating,the displacement stage,the readhead,the optics,and other system modules,there will be geometric errors in the system.The non-ideal assembly of the grating and the displacement stage,as well as the non-ideal assembly of the grating and the readhead,are the main factors leading to the geometrical error of the system.In this paper,we analyse the attitude position error between grating,displacement stage and readhead which occurs during the displacement measurement of grating interferometer,by establishing displacement coordinate system OXYZ and grating coordinate system OX'Y'Z',and referring to the attitude representation method of aircraft in the field of inertial navigation.We set the roll,pitch and yaw angles of one-dimensional grating to beα,βandγrespectively,which are common in

关 键 词：精密位移测量 光栅干涉仪 光栅矢量衍射 周期性误差 

分 类 号：TB96[机械工程—光学工程]