具有温度补偿的微细圆柱基MEMS流速传感器研究  

Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation

作　　者：黄皓凯 胡致远 叶丰明 杨卓青[1] HUANG Haokai;HU Zhiyuan;YE Fengming;YANG Zhuoqing(National Key Lab.of Advanced Micro and Nano Manufacture Technology,School of Electronic Information and Electrical Engineering,Shanghai Jiaotong University,Shanghai 200240,CHN;Dept.of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiaotong University,Shanghai 200240,CHN)

机构地区：[1]上海交通大学微米纳米加工技术全国重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院微纳电子系,上海200240

出　　处：《半导体光电》2024年第1期29-35,共7页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61974088)。

摘　　要：目前常见的流速传感器由于尺寸原因,只能介入管径较大的管道进行液体流速测量。设计并制造了一种可介入小管径管道的、具有温度补偿功能的圆柱基流速传感器,器件采用旋转投影曝光和微机电系统(MEMS)技术制作而成,包含一个薄膜型加热电阻和一个稳定补偿电阻,基于热阻原理可实现对不同温度流体流速的精确测量。测试结果表明:该流速传感器的温度系数为0.2236%/℃,灵敏度为4.25 mV/(cm·s^(-1))。研制的圆柱基MEMS流速传感器可在内径为2 mm的管道中对具有一定温度变化的流体进行流速测量,有望应用于工业、生物医学等领域。Due to size reasons,current common flow rate sensors can only be inserted into pipes with larger diameters to measure liquid flow rate.To be placed into a micro pipeline,a cylindrical thermal-resistance micro-electromechanical system(MEMS) flow sensor with temperature compensation was designed and fabricated.It is composed of a heating resistor and a temperature-measuring resistor to measure the flow rate through the working principle of heat loss.The experimental results show that the temperature coefficient of resistance(TCR) is 0.2236%/℃ and the sensitivity was 4.25 mV/(cm·s~(-1)).The designed circuits demonstrate an excellent effect of temperature compensation for accurate measuring results.The proposed flow sensor can measure the flow rate in a pipe with an inner diameter of 2 mm,and is expected to be applied to the industrial,biomedical and other fields.

关 键 词：微机电系统 微细圆柱基底 热阻式 温度补偿 流速传感器 

分 类 号：TN929.11[电子电信—通信与信息系统]