大功率磁悬浮泵宽流道叶轮的水力性能分析  

Hydraulic Performance Analysis of Wide Channel Impeller of High Power Maglev Pump

作　　者：白晓蓉 胡亮[1] 阮晓东[1] 苏芮 傅新[1] BAI Xiao-rong;HU Liang;RUAN Xiao-dong;SU Rui;FU Xin(The State Key Lab of Fluid Power and Mechatronic System,Zhejiang University,Hangzhou,Zhejiang 310027)

机构地区：[1]浙江大学流体动力与机电系统国家重点实验室,浙江杭州310027

出　　处：《液压与气动》2024年第3期91-98,共8页Chinese Hydraulics & Pneumatics

基　　金：浙江省“尖兵”计划项目“高端半导体装备超洁净泵的研发与应用”(2023C01015)。

摘　　要：磁悬浮泵将磁悬浮电机与泵体结构一体化,利用磁场驱动叶轮旋转,并对其余5个自由度进行主/被动悬浮约束,从而实现完全无轴承的介质泵送,被广泛用于半导体制造等领域的电子化学品超洁净输送。目前,大功率磁悬浮泵产品存在泵送效率低的问题,同时随着功率的增加,磁悬浮泵的液压轴向力平衡问题越发突出。为此,设计了一种大功率磁悬浮泵的宽流道叶轮,并对其进行水力效率、液压轴向力及液压径向力分析。通过仿真研究,首先阐述了窄流道效应对大功率磁悬浮泵水力效率的影响,并对宽流道叶轮及窄流道叶轮进行水力效率对比分析;其次对宽流道叶轮的液压轴向力及径向力进行计算分析,表明宽流道设计对叶轮液压轴向力及径向力的影响,为大功率磁悬浮泵高效水力设计开发提供关键技术支撑。The maglev pump integrates the maglev motor and the pump body structure,uses the magnetic field to drive the impeller to rotate,and implements active/passive levitation constraints on the remaining five degrees of freedom,so as to realize a completely bearingless medium pumping.It is widely used in the ultraclean transportation of electronic chemicals in high-tech industrial fields including semiconductor manufacturing.At present,foreign high-power maglev pump products have the problem of low pumping efficiency.Besides,with the increase of power,the problem of hydraulic axial force balance of the maglev pump becomes more and more prominent.Therefore,the paper designs a high-power maglev pump with a wide flow channel impeller,and analyzes its hydraulic efficiency,hydraulic axial force and hydraulic radial force.First,the influence of narrow channel effect on the hydraulic efficiency of high-power magnetic levitation pump is described.A comparative analysis of the hydraulic efficiency of the wide and narrow flow channel impellers are carried out.Then the hydraulic axial force and radial force of wide channel impeller are calculated and analyzed,which shows the influence of wide channel design on the hydraulic axial force and radial force of the impeller.This paper will provides key technical support for high-efficiency hydraulic design and development of high-power maglev pump.

关 键 词：磁悬浮泵 宽流道 水力效率 轴向力 径向力 

分 类 号：TH137[机械工程—机械制造及自动化]