40~90 nm波段极紫外多层膜研究进展  

Research developments of extreme ultra-violet multilayers for 40-90 nm

作　　者：来搏 蒋励[1] 齐润泽 王占山[1] LAI Bo;JIANG Li;Qi Runze;WANG Zhanshan(MOE Key Laboratory of Advanced Micro-structured Materials of Ministry of Education,Institute of Precision Optical Engineering(IPOE),School of Physics Science and Engineering Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院精密光学工程技术研究所先进微结构材料教育部重点实验室,上海200092

出　　处：《光学精密工程》2024年第9期1293-1306,共14页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.12204353,No.12003016);中央高校基本科研业务费专项资金资助项目。

摘　　要：极紫外多层膜反射镜在许多科学与技术领域,如极紫外光刻、天体物理学、等离子体诊断、阿秒物理和自由电子激光等方面有重要应用。多层膜使极紫外波段反射镜在正入射条件下具有高反射率和窄带宽成为可能。多层膜反射镜是极紫外成像和光谱应用的重要器件,多层膜构成的极紫外成像系统已成功完成多个太阳单一谱线的成像观测。本文综述了40~90 nm波段最有前景的多层膜的研究进展。首先简要介绍了多层膜的基本原理,叙述了40~90 nm波段材料光学常数的测量,总结了Mg基、Sc基和镧系材料以及其他材料组成多层膜的进展,给出了目前达到的最佳反射率和带宽,阐明了多层膜的时间稳定性,从而为40~90 nm波段多层膜制备提供了技术指导。The multilayer mirrors in the extreme ultraviolet region have significantly advanced various sci⁃entific and technological fields,including extreme ultraviolet lithography,astrophysics,plasma diagnosis,attophysics,and free electron lasers.These multilayer coatings are crucial for developing mirrors that achieve high reflectivity and narrow bandwidth at normal incidence within the extreme ultraviolet spec⁃trum.Multilayer mirrors are now key components in both imaging and spectroscopy across various applica⁃tions.Optical imaging systems equipped with multilayer mirrors have conducted numerous solar observa⁃tions in different emission lines,achieving unprecedented spatial and spectral resolutions.This paper re⁃views the progress of the most promising multilayer mirrors,covering the 40 nm to 90 nm range.Follow⁃ing a brief introduction to multilayer theory,it highlights the most promising material pairs and layer stack structures based on Mg,Sc,and lanthanides.The review emphasizes multilayer mirrors that exhibit high reflectivity within the 40 nm to 90 nm wavelength range and discusses their temporal stability.

关 键 词：光学薄膜 极紫外 多层膜 窄带 高反射 

分 类 号：TN405[电子电信—微电子学与固体电子学] TN23