溅射功率对直流磁控溅射TiAlN涂层组织和摩擦学性能的影响  

Effect of Sputtering Power on Microstructure and Tribological Properties of Direct-Current Magnetron Sputtered TiAlN Coating

作　　者：孙琛扬 王疆瑛[1] 张高会 徐欣 SUN Chenyang;WANG Jiangying;ZHANG Gaohui;XU Xin(School of Materials and Chemistry,China Jiliang University,Hangzhou 310018,China;Taizhou Institute of Measurement Technology,Taizhou 317700,China)

机构地区：[1]中国计量大学材料与化学学院,杭州310018 [2]台州市计量技术研究院,台州317700

出　　处：《机械工程材料》2024年第5期116-122,共7页Materials For Mechanical Engineering

摘　　要：在室温下采用直流磁控溅射技术在304L不锈钢表面制备TiAlN涂层,研究了溅射功率(80,100,120,140,160 W)对TiAlN涂层组织和摩擦学性能的影响。结果表明:TiAlN涂层由面心立方结构的TiAlN相以及少量TiN和AlN相组成。随着溅射功率的增加,TiAlN涂层变厚,表面晶粒更加致密,但溅射功率160 W下制备的涂层表面大颗粒较多,晶粒尺寸先变小后变大,结合力先增大后减小,平均摩擦因数和比磨损率均整体呈先减小后增大的趋势;溅射功率140 W下制备的涂层具有最小的晶粒尺寸、最强的结合力、最小的平均摩擦因数和比磨损率,磨痕较平整且仅有少量磨屑,磨损机制为轻微的黏着磨损。TiAlN coating was prepared on 304L stainless steel surface by direct-current magnetron sputtering at room temperature.The effects of sputtering power(80,100,120,140,160 W)on the microstructure and tribological properties of TiAlN coating were studied.The results show that TiAlN coating consisted of TiAlN phase with a face-centered cubic structure and a small amount of TiN and AlN phases.With the increase of sputtering power,TiAlN coating was thickened and the surface grains became denser.However,the surface of the coating prepared at 160 W sputtering power had many large particles.With the increase of sputtering power,the grain size first decreased and then increased,the binding force first increased and then decreased,and the average friction coefficient and specific wear rate first decreased and then increased.The coating prepared at 140 W sputtering power had the smallest grain size,the strongest binding force,the smallest average friction factor and the specific wear rate.The wear scars were relatively flat and there were only a few abrasive chips under 140 W laser power and the wear mechanism was slight adhesive wear.

关 键 词：TIALN涂层 直流磁控溅射 溅射功率 摩擦学性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]