扫描电镜故障分析与维修实例  

Scanning electron microscope failure analysis and maintenance examples

作　　者：孙秋香 卢慧粉 宋鹏 李丹丹 SUN Qiuxiang;LU Huifen;SONG Peng;LI Dandan(Jining Institute of Quality&Metrology Inspection,Jining 272000,China)

机构地区：[1]济宁市质量计量检验检测研究院,济宁272000

出　　处：《理化检验（物理分册）》2024年第4期76-77,共2页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：针对场发射扫描电镜实际使用中出现的故障问题,详细分析了故障产生的原因,并结合实际给出了该扫描电镜故障解决方案。结果表明:两次出现故障的主要原因是当扫描电镜关机后,再次开机时,开机的瞬间电压或电流对设备上的元器件造成一定损伤,最终导致扫描电镜开机失败。结果可为测试人员提供有力的技术支持。Aiming at the failure problems in the actual use of field emission scanning electron microscope,the causes of the failure were analyzed in detail,and the solution to the failure of the scanning electron microscope was given in combination with the actual situation.The results show that the main reason for the two failures was that when the scanning electron microscope was turned off and turned on again,the instantaneous voltage or current of the boot caused some damage to the components on the equipment,which eventually led to the failure of the scanning electron microscope boot.The results could provide strong technical support for the testers.

关 键 词：扫描电镜 故障 瞬间电压 电源控制系统 高压系统 

分 类 号：TH89[机械工程—仪器科学与技术] TB30[机械工程—精密仪器及机械]