磁浮平面电机在超精密工件台中的应用  

Application of Magnetic Floating Planer Motor in Ultra-Precision Stage

作　　者：王伟[1] 王文举[1] 张继静[1] WANG Wei;WANG Wenju;ZHANG Jijing(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2024年第3期68-71,共4页Equipment for Electronic Products Manufacturing

摘　　要：为了提高半导体设备生产效率和整机性能,设备制造商想尽各种办法。介绍了超精密工件台三维模型,以及磁浮平面电机原理、组成、特性、技术指标与应用前景。同时阐述了超精密工件台采用磁浮平面电机,具有结构简单、高速度和高加速度、高精度、以及无污染产生等优点,使得它不但能够满足目前半导体设备技术发展的需求,也能满足未来半导体设备技术发展的需求。In order to enhance the throughput and the performance of the overall semiconductor equipment,the maker of them adopt many new methods and new technology.This paper introduces the three-dimensional model of ultra-precision stage、and the principle、composition、characteristics、technical index and application prospect of maglev planar motor.The maglev planar motor is used in the ultra-precision stage,which has the advantages of simple structure,high speed and high acceleration,high precision and no pollution.It not only meets the needs of the current semiconductor equipment technology development,but also meets the needs of the future semiconductor equipment technology development.

关 键 词：半导体设备 超精密工件台 磁浮平面电机 双工件台 

分 类 号：TN305[电子电信—物理电子学]