纳米压印技术的产业化问题分析  

Analysis of Industrialization Issues in Nanoimprint Lithography

作　　者：李芳 樊丽 陈晨 张静 LI Fang;FAN Li;CHEN Chen;ZHANG Jing(Shanghai Nanotechnology and Industry Development Promotion Center,Shanghai 200237,China)

机构地区：[1]上海市纳米科技与产业发展促进中心,上海200237

出　　处：《集成电路应用》2024年第4期13-17,共5页Application of IC

基　　金：上海科学院关键共性技术攻关计划(SKY202204);陕煤-秦岭基础科学研究五年行动计划项目。

摘　　要：阐述纳米压印技术是一种新型的微纳加工先进制造技术,具有分辨率高、产量高和成本低等优点,在光学、集成电路、数据存储、生命科学等领域有着广泛的应用前景。介绍纳米压印工艺原理,分析纳米压印技术的产业化问题,并根据实际状况,给出中国纳米压印产业化发展的建议。This paper describes that nanoimprint lithography is a new type of advanced manufacturing technology for micro and nano processing,which has advantages such as high resolution,high yield,and low cost.It has broad application prospects in fields such as optics,integrated circuits,data storage,and life sciences.It introduces the principle of nanoimprint lithography,analyzes the industrialization issues of nanoimprint lithography,and provides suggestions for the development of nanoimprinting industrialization in China based on the actual situation.

关 键 词：集成电路 数据存储 纳米压印 先进制造 产业化 

分 类 号：TN05[电子电信—物理电子学]