适用于数值孔径和像素尺寸受限的高分辨率叠层成像方法  

High-Resolution Ptychography Method to Solve the Limitation Problem of Numerical Aperture and Pixel Size

作　　者：张静怡 裴子豪 胡友友 杨忠明 窦健泰 Zhang Jingyi;Pei Zihao;Hu Youyou;Yang Zhongming;Dou Jiantai(College of Science,Jiangsu University of Science and Technology,Zhenjiang 212100,Jiangsu,China;School of Information Science and Engineering,Shandong University,Qingdao 266237,Shandong,China)

机构地区：[1]江苏科技大学理学院,江苏镇江212100 [2]山东大学信息科学与工程学院,山东青岛266237

出　　处：《激光与光电子学进展》2024年第8期108-114,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62205133);江苏省自然科学基金(BK20190954)。

摘　　要：叠层成像的成像分辨率会受到数值孔径和电荷耦合器件(CCD)像素尺寸的限制。CCD靶面有限则数值孔径有限,采集大光斑图像时,易丢失CCD靶面边缘的部分高频信息。此外,像素尺寸较大会导致成像时采样率不足,也会丢失部分细节高频信息。提出了一种高分辨率叠层成像方法,可同时处理数值孔径和CCD像素尺寸的分辨率限制问题。首先,利用外推法补充因数值孔径有限丢失的高阶衍射信息,之后将外推法重建的图像代入基于多权重损失函数的生成对抗网络中,即可快速解决像素尺寸受限问题,提高成像分辨率。多权重损失函数为均方误差、特征图误差和对抗误差的加权和。通过设置合理的权重,可以实现像素和视觉层面的均衡处理。仿真及实验结果表明,该方法在提高叠层成像系统分辨率上具有显著效果,且运算效率高。Imaging resolution of the ptychography is limited by the numerical aperture and CCD(charge coupled device)pixel size.When the CCD target surface is limited,the numerical aperture is limited,and the highfrequency information of the edge of the CCD target surface is easy to miss under the condition that the collected spot is large.In addition,the larger pixel size leads to insufficient sampling rate during imaging,and some detailed highfrequency information will be lost.We propose a highresolution ptychography method,which can simultaneously solve the resolution problem limited by the numerical aperture and CCD pixel size.First,the extrapolation method is used to supplement the higherorder diffraction information lost due to the limited numerical aperture,and the image reconstructed by the extrapolation method is substituted into the generative adversarial network based on the multiweight loss function,which can quickly solve the problem of pixel size limitation and improve the imaging resolution.The multiweight loss function is the weighted sum of mean square error,feature map error and adversarial error.By setting reasonable weights,the pixel and visual level can be balanced.The simulation and experimental results show that this method has a significant effect on improving the resolution of the ptychography and has high computational efficiency.

关 键 词：超分辨率 叠层成像 外推法 生成对抗网络 多权重损失函数 

分 类 号：O438[机械工程—光学工程]