基于激光位移传感器的预对准方法分析  

Analysis of Pre-alignment Methods Based on Laser Displacement Sensors

作　　者：苏海业 SU Haiye(Shanghai Microelectronics Equipment(Group)Co.,Ltd.,Shanghai 200093,China)

机构地区：[1]上海微电子装备(集团)股份有限公司,上海200093

出　　处：《集成电路应用》2024年第5期48-51,共4页Application of IC

摘　　要：阐述设计的一种基于高精度激光位移传感器实现预对准的方法,并分析晶圆边缘扫描特征对晶圆圆心定位精度误差的主要影响因素。为进一步探究原因,同时测试工件台水平度、采样频率和扫描路径对晶圆扫描结果的影响,验证了使用激光位移传感器实现激光退火前预对准的有效性、稳定性。This paper describes a method for the implementation of a high-precision laser displacement sensor,and analyzes the main error source of the accuracy of the circular center.In order to further explore the reason,the effect of the surface level,sampling frequency and scanning path of the disc was tested,and the validity of the pre-alignment was verified by using the laser displacement sensor.

关 键 词：预对准 激光位移传感器 圆心 激光退火 特征曲线 晶圆加工 

分 类 号：TN405[电子电信—微电子学与固体电子学]