大行程推拉电磁驱动微定位平台的内环阻尼与迭代学习控制  

Inner Loop Damping and Iterative Learning Control of a Large Stroke Micro-positioning Stage Driven by Push-pull Electromagnetic Actuators

作　　者：刘昊 赖磊捷 LIU Hao;LAI Leijie(School of Mechanical and Automotive Engineering,Shanghai University of Engineering Science,Shanghai 201620,China)

机构地区：[1]上海工程技术大学机械与汽车工程学院,上海201620

出　　处：《机械科学与技术》2024年第7期1238-1243,共6页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金项目(51605275);上海自然科学基金项目(21ZR1426000);机械系统与振动国家重点实验室课题项目(MSV202210)。

摘　　要：为了解决音圈电机驱动柔性微定位平台驱动力小和低阻尼谐振等问题,本文采用两侧音圈电机的推拉模式来提升驱动力的大小,并且利用内环阻尼控制器结合迭代学习控制方法来实现平台的精准控制。首先,搭建了互补配置的双音圈电机驱动双平行四边形柔性机构的微定位平台。其次,设计了内环阻尼速度反馈控制器。然后,采用逆模型迭代学习控制方法来进一步消除周期性的干扰和误差。最后进行了跟踪实验。结果表明:在跟踪1 Hz和2.5 Hz的正弦波时,相比于PI控制,最大误差分别减少74.6%和68.6%,满足微定位平台精准控制的要求。In order to solve the problems of small driving force and low damping resonance of the flexure micro-positioning stage driven by voice coil motors(VCM),a push-pull mode of VCMs on both sides is adopted to enhance the driving force,and the inner loop damping controller combined with iterative learning control(ILC)method is used to realize the precise control of the stage.Firstly,a micro-positioning stage of compound parallelogram flexure mechanism driven by dual VCMs with complementary configuration is built.Secondly,an inner loop damping speed feedback controller is designed.Then,the inverse model ILC method is used to eliminate the periodic interference and error.Finally,the tracking experiment is carried out.The results show that when tracking the sine wave of 1 Hz and 2.5 Hz,the maximum error is reduced by 74.6%and 68.6%respectively compared with PI control,which meets the requirements of precise control of the micro-positioning stage.

关 键 词：阻尼控制 迭代学习控制 微定位平台 音圈电机 柔性机构 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置]