TOPCon电池中的EL卡点印缺陷分析  

Analysis of EL Card Dot Print Defects in TOPCon Batteries

作　　者：李国庆 居瑞智 谢路华 李香伟 谢致任 LI Guoqing;JU Ruizhi;XIE Luhua;LI Xiangwei;XIE Zhiren(Shenzhen Jiejiawei Innovation Energy Equipment Co.,Ltd.,Guangdong 518118,China)

机构地区：[1]深圳市捷佳伟创新能源装备股份有限公司,广东518118

出　　处：《集成电路应用》2024年第6期30-33,共4页Application of IC

摘　　要：阐述PE-Poly是N型TOPCon太阳电池工艺中的难点与关键,电致发光(EL)卡点印是PE-Poly路线TOPCon电池主要缺陷之一。基于PE-poly路线TOPCon电池量产设备和工艺,通过电性能测试、椭偏仪测试、QE测试以及对比实验,针对此类电池EL缺陷问题进行分类研究,为电池片制程良率提升提供改善方向。This paper describes the difficulty and key of PE Poly in the N-type TOPCon solar cell process,and electroluminescence(EL)checkpoint printing is one of the main defects of the PE Poly route TOPCon battery.Based on the PE poly route TOPCon battery mass production equipment and process,it conducts classification research on EL defects in such batteries through electrical performance testing,ellipsometer testing,QE testing,and comparative experiments,providing improvement directions for improving the process yield of battery cells.

关 键 词：TOPCon电池 PE-Poly 隧穿氧化层 原位掺杂 界面 

分 类 号：TN86[电子电信—信息与通信工程] TM914[电气工程—电力电子与电力传动]