二自由度并联压电粘滑定位平台  

Two-degree-of-freedom Parallel Piezoelectric Stick-slip Positioning Platform

作　　者：许锰 杨依领 吴高华 崔玉国[1] 魏燕定[2] XU Meng;YANG Yiling;WU Gaohua;CUI Yuguo;WEI Yanding(Part Rolling Key Laboratory of Zhejiang Province,Ningbo University,Ningbo 315211;Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province,Zhejiang University,Hangzhou 310027)

机构地区：[1]宁波大学浙江省零件轧制成形技术研究重点实验室,宁波315211 [2]浙江大学浙江省先进制造技术重点实验室,杭州310027

出　　处：《机械工程学报》2024年第11期250-258,共9页Journal of Mechanical Engineering

基　　金：浙江省自然科学基金(LY22E050002);宁波市自然科学基金(2022J133);国家自然科学基金(51805276,51975517);宁波市重大科技攻关(2022Z062)资助项目。

摘　　要：针对粘滑运动的周期性循环应力易导致柔顺机构疲劳问题,设计低应力、高分辨率和无耦合的二自由度宏行程定位平台。采用双圆弧仿生柔性铰链设计柔顺驱动单元,减小应力并提高结构刚度。然后,结合压电粘滑驱动与正交导向机构,实现平台的高分辨率、大行程二维并联解耦运动。之后,采用有限元法和伪刚体模型对定位平台进行静力学与动力学分析,并通过Ansys Workbench软件对平台应力、频率和单步位移等进行仿真。最后,搭建实验平台并进行性能测试。实验结果表明:平台最大速度为9.03 mm/s,x和y向位移耦合率为0.89%和0.92%,分辨率为10 nm和11 nm,最大水平与垂直承载能力分别为1.4 N和40 N。实验结果验证了结构设计及理论模型的有效性。Regarding the fatigue problem of compliant mechanisms arising from the cyclic stress of viscous-slip motion,a low-stress,high-resolution,decoupled two-degree-of-freedom macro stroke positioning platform is designed.Bionic flexible hinges with double circular arcs are used in designing the compliant driving unit,thus reducing stress and improving structural stiffness.Then,piezoelectric stick-slip driving is combined with the orthogonal guidance mechanism to realize the platform's high-resolution,large-stroke two-dimensional parallel decoupled motion.After that,the finite element method and pseudo-rigid body model are used to analyze the positioning platform statically and dynamically,and the platform stress,frequency,and single-step displacement are simulated by ANSYS Workbench software.Finally,the experimental platform is built,and performances are tested.The experimental results show that the maximum velocity of the platform is 9.03 mm/s,the x-and y-directional displacement coupling rate is 0.89%and 0.92%,the resolution is 10 nm and 11 nm,and the maximum horizontal and vertical load capacity is 1.4 N and 40 N.The validity of the structural design and theoretical model is verified by experimental results.

关 键 词：压电驱动 粘滑运动 低应力 柔顺机构 二自由度 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]