基于多面体转镜HfO_(2)薄膜的制备及性能研究  

Preparation and Properties of HfO_(2)Thin Film Deposited on Polygon Mirror

作　　者：陈兴凤 张伟丽[2] 洪瑞金[1] 李令灏 陈才 冯操 王蒙雷 王麟 王勤敏 王焜 Chen Xingfeng;Zhang Weili;Hong Ruijin;Li Linghao;Chen Cai;Feng Cao;Wang Menglei;Wang Lin;Wang Qinmin;Wang Kun(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Thin Film Optics Laboratory,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;School of Materials Science and Engineering,Hunan University,Changsha 410082,Hunan,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]中国科学院上海光学精密机械研究所薄膜光学实验室,上海201800 [3]湖南大学材料科学与工程学院,湖南长沙410082

出　　处：《中国激光》2024年第12期450-456,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(62075133,62275159)。

摘　　要：多面体转镜是激光直写设备中激光光束扫描系统的核心部件,其光学表面的反射率和均匀性会直接影响光刻机的扫描精度。研究了沉积在转镜上的氧化铪(HfO_(2))膜层的光谱特性、微观结构、表面和截面形貌、堆积密度等特征,并与沉积在平面行星上的HfO_(2)膜层的相关性能进行对比分析。测试结果表明,与平面行星上的HfO_(2)膜层相比,多面体转镜上的HfO_(2)膜层的折射率低0.13、堆积密度低0.15、结晶质量更差、表面粗糙度大1.01 nm。分析了多面体转镜上的HfO_(2)膜层的均匀性,并进行技术改进,改进后的HfO_(2)膜层的折射率提高了0.11、均匀性提高了0.24%。Objective Laser direct writing equipment in a laser beam scanning system consists of polygon mirrors,drive motors,field mirrors,and feedback mechanisms.The reflectivity and uniformity of the surfaces of polygon mirrors,which are the core components of the laser scanning module,directly affect the scanning accuracy of the system.The overall performance of a laser direct-writing equipment is affected when the reflectivity change is 0.1%.Polygon mirrors require high reflectivity and uniformity,the performances of existing domestic products cannot satisfy these requirements.However,there is no literature on the polygon mirror on the film characteristics of systematic and detailed research and analysis;therefore,there is an urgent need to perform in-depth research on the structure and optical properties of film layers on polygon mirrors.Methods HfO_(2)thin film samples are prepared on planar planets and rotating mirrors using the electron beam evaporation technique.To facilitate the test,quartz substrates are used with the plated films,and the substrates are fixed on planar planetary fixture 1 and polygon mirror fixture 2(Fig.2).The samples on planar planetary fixture 1 and the polygon mirrors are rotated around the vertical line.The rotational speed ratio between samples 1 and 2 is 1∶6.The background vacuum during film deposition is 3.0×10^(-3)Pa,and the specific process parameters for film deposition are listed in Table 1.Results and Discussions There is a significant difference between the films on the planar planets and those on the polygon mirrors.The number of peaks and valleys for sample 1 on the planar planets is approximately twice that for sample 2 on the polygon mirrors,suggesting that the thickness of sample 1 is greater than that of sample 2.Second,the minimum transmittance of sample 1 nearλ=405 nm is higher than that of sample 2 by approximately 5%,indicating that there is a significant difference in the magnitude of the refractive indices of the two samples:the refractive index of sample 1 is larger

关 键 词：光刻 激光直写 多面体转镜 转镜镀膜 反射率 均匀性 堆积密度 

分 类 号：O484.1[理学—固体物理]