基于光纤光栅毛细钢管电镀封装结构的温度传感特性研究  

Research on Temperature Sensing Characteristics Based on Capillary Tube Electroplating Encapsulation Structure of Fiber Bragg Grating

作　　者：刘明尧[1] 张品 李聪 LIU Mingyao;ZHANG Pin;LI Cong(School of Mechanical and Electronic Engineering,Wuhan University of Technology)

机构地区：[1]武汉理工大学机电工程学院

出　　处：《仪表技术与传感器》2024年第7期25-29,共5页Instrument Technique and Sensor

摘　　要：采用毛细钢管对布拉格光纤光栅(FBG)封装有保护和温度增敏的效果。FBG和毛细钢管之间一般采用环氧胶连接,这会影响传感器的灵敏性和可靠性。为此,提出了一种基于磁控溅射和电镀相结合的毛细钢管封装工艺。首先在裸FBG上磁控溅射镍金属导电层,然后用电镀工艺将光纤和毛细钢管的两端固定连接。电镀连接层表面光滑,没有明显缺陷。相较于胶粘封装,使用电镀封装的FBG温度传感器在25~95℃的温度范围内具有优异的线性度。封装结构的温度传感灵敏度是裸FBG的2.63倍。结果表明,毛细钢管电镀封装结构不仅可以提高温度传感灵敏度,还能在高温下具有稳定的传感性能。Encapsulation of fiber Bragg grating(FBG)with capillary tube has the effect of protection and temperature sensitization.The epoxy glue is usually used to connect the FBG and the capillary tube,which can affect the sensitivity and reliability of the sensor.Therefore,a capillary tube encapsulation process based on the combination of magnetron sputtering and electroplating was proposed.Firstly,a nickel metal conductive layer was sputtered on the bare FBG by magnetron sputtering,and then the two ends of the capillary steel tube were fixedly connected with the optical fiber by an electroplating process.The surface of the electroplated connecting layer is smooth and has no obvious defects.Electroplated encapsulation FBG temperature sensor has excellent linearity over the full temperature range compared to glued encapsulation at 25℃to 95℃.The temperature sensing sensitivity of the encapsulation structure is 2.63 times that of the bare FBG.The results show that the electroplated encapsulation structure of capillary tube not only improves the sensitivity of temperature sensing,but also has stable sensing performance at high temperature.

关 键 词：布拉格光纤光栅 温度传感器 毛细管 磁控溅射 电镀 封装结构 

分 类 号：TN253[电子电信—物理电子学]