低功耗检测CO_(2)的MEMS红外光源结构设计与仿真  

Structural Design and Simulation of MEMS Infrared Light Source for CO_(2)Detection with Low Power Consumption

作　　者：滕雪松 禹胜林[1] 魏志杰 房村 熊思娴 王梦婷 TENG Xuesong;YU Shenglin;WEI Zhijie;FANG Cun;XIONG Sixian;WANG Mengting(School of Electronic and Information Engineering,Nanjing University of Information Science and Technology,Nanjing 210000,China)

机构地区：[1]南京信息工程大学电子与信息工程学院,江苏南京210000

出　　处：《红外技术》2024年第8期858-863,共6页Infrared Technology

摘　　要：传统的二氧化碳传感器存在着体积大、功耗高等问题,近年来随着半导体技术和材料的发展,MEMS技术逐渐成为传感器的研究重点。研究并设计了一种适用于二氧化碳传感器的微机电系统(micro-electro-mechanical system,MEMS)红外光源芯片结构,采用硅(Si)作为基底,氧化硅(SiO_(2))-氮化硅(Si_(3)N_(4))-氧化硅(SiO_(2))作为红外光源的支撑层材料,辐射区的加热电阻采用延展性良好的铂(Pt),以铝(Al)为电极。光源的支撑层采用四轴大圆角悬空结构,极大减少了辐射区热量向衬底的热传导且稳定性较好,通过有限元仿真分析,该光源具有低功耗和结构稳固的特点。Conventional carbon dioxide sensors pose significant drawbacks such as large size and high power consumption.In recent years,with the development of semiconductor technology and materials,microelectromechanical systems(MEMS)technology has gradually become the focus of sensor research.In this study,a microelectromechanical system with an infrared light source chip structure for carbon dioxide sensors was designed and investigated.Silicon(Si)was used as the substrate,silicon dioxide(SiO_(2))–silicon nitride(Si_(3)N_(4))–silicon dioxide(SiO_(2))was used as the support layer of the infrared light source,platinum(Pt),which has good ductility,was used as the heating resistor for the radiation area,and aluminum(Al)was used as the electrode.The support layer of the light source adopted a four-axis large rounded corner suspension structure,which significantly reduced the thermal conduction of heat from the radiation area to the substrate and provided better stability.Through finite element simulation analysis,the light source was characterized by low power consumption and a solid structure.

关 键 词：微机械电子系统 红外光源 低功耗 稳固结构 

分 类 号：TN212[电子电信—物理电子学]