基于微纳结构的MEMS红外窄带热光源及其应用  

Infrared Narrowband Thermal Emitter Utilizing Nanostructures in MEMS and Its Applications

作　　者：李若禺 郭小伟[1,2] 张驰 李绍荣 Li Ruoyu;Guo Xiaowei;Zhang Chi;Li Shaorong(Yangtze Delta Region Institute(Huzhou),University of Electronic Science and Technology of China,Huzhou 313001,Zhejiang,China;School of Optoelectronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 610054,Sichuan,China)

机构地区：[1]电子科技大学长三角研究院,浙江湖州313001 [2]电子科技大学光电科学与工程学院,四川成都610054

出　　处：《激光与光电子学进展》2024年第13期139-152,共14页Laser & Optoelectronics Progress

基　　金：四川省科技计划项目(2022ZYD0110);中国烟草总公司四川分公司项目(SCYC202120)。

摘　　要：热发射光谱在环境监测、天体物理、医学诊断和药物研发等领域得到广泛关注和利用。基于微机电系统的红外光源虽然有效缩小了器件体积,但仍存在光谱分布范围广、发射率较低等缺点,通过对微纳结构的合理利用,可以控制热发射的光谱特性,有效提高窄带发射性能。首先对微机电系统(MEMS)红外热辐射光源的基本原理进行了阐释,其次介绍了基于光栅、光子晶体及超表面结构等微纳结构的MEMS红外窄带热光源的研究进展,随后对红外窄带热光源在气体传感、热光伏发电、生物医学等领域的应用进行了简单介绍,最后对上述几种基于微纳结构的窄带光源的性能进行了对比及总结。The thermal emission spectrum has found widespread applications in environmental monitoring,astrophysics,medical diagnosis,and drug development.Despite the effectiveness of microelectromechanical system(MEMS)-based infrared emitters in reducing device size,they exhibit drawbacks like a broad spectral distribution range and low emissivity.This paper explores the enhancement of thermal emission characteristics by integrating nanostructures,allowing precise control over spectral features,and effectively improving narrowband emission.The discussion begins with an elucidation of the fundamental principles governing MEMS infrared thermal emission emitters.Subsequently,we delve into the advancements in MEMS infrared narrowband thermal emitters featuring nanostructures such as gratings,photonic crystals,and metasurface structures.The paper further provides a brief overview of the applications of infrared narrowband thermal emitters in gas sensing,thermophotovoltaic power generation,biomedical,and other fields.Finally,a comparative analysis and summary of the performance of nanostructurebased narrowband emitters are presented.

关 键 词：热发射 红外光源 窄带发射 微机电系统 

分 类 号：O436[机械工程—光学工程]