MEMS器件可靠性评价标准分析及建议  

Analysis and Suggestion on Reliability Evaluation Standards of MEMS Devices

作　　者：尹丽晶[1] 张魁 崔波[1] YIN Li-jing;ZHANG Kui;CUI Bo(The 13th Research Institute,CETC,Shijiazhuang 050051;National Semiconductor Device Quality Inspection and Testing Center,Shijiazhuang 050051;Hebei Beixin Semiconductor Technology Co.,LTD.,Shijiazhuang 050051)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]国家半导体器件质量检验检测中心,石家庄050051 [3]河北北芯半导体科技有限公司,石家庄050051

出　　处：《环境技术》2024年第8期23-27,共5页Environmental Technology

摘　　要：本文研究了MEMS器件的失效模式和失效机理,进行了归纳总结;基于其模式和失效机理,分析了MEMS器件的可靠性试验项目和相关试验标准,总结了可靠性试验现状。最后,针对以上情况对MEMS器件可靠性试验的标准体系建设和完善提出了建议,进行了展望。This paper studied and summarized the failure mode and failure mechanism of MEMS devices.Based on its mode and failure mechanism,the reliability test items and related test standards of MEMS devices are analyzed,and the current status of reliability test is summarized.Finally,in view of the above situation,some suggestions are put forward for the construction and improvement of the standard system for reliability testing of MEMS devices,and the prospects are discussed.

关 键 词：MEMS器件 可靠性 标准 

分 类 号：TH842[机械工程—仪器科学与技术]