MEMS静电驱动微镜阵列的设计与工艺研究  

Design and process study of MEMS electrostatic-actuated micromirror array

作　　者：胡钰玮 王俊铎 单亚蒙 钱磊 于悦 沈文江[2] HU Yuwei;WANG Junduo;SHAN Yameng;QIAN Lei;YU Yue;SHEN Wenjiang(School of Nano-Tech and Nano-Bionics,University of Science and Technology of China,Hefei 230026,China;Key Laboratory of Nanodevices and Applications,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China;Nano Science and Technology Institute,University of Science and Technology of China,Suzhou 215123,China)

机构地区：[1]中国科学技术大学纳米技术与纳米仿生学院,安徽合肥230026 [2]中国科学院苏州纳米技术与纳米仿生研究所纳米器件与应用重点实验室,江苏苏州215123 [3]中国科学技术大学纳米科学技术学院,江苏苏州215123

出　　处：《传感器与微系统》2024年第10期113-116,共4页Transducer and Microsystem Technologies

摘　　要：基于微机电系统(MEMS)工艺,设计并制作了一种应用于光通信领域的二维准静态驱动微镜阵列(MMA)。相比于梳齿驱动,平行板电容式静电微镜更易于形成高占空比的阵列排布,有利于作为光开关矩阵应用在全光交换中。通过设计弹性系数小的“竖蛇形”双扭转轴结构,有效降低了微镜的驱动电压;并采用硅—玻璃阳极键合工艺来实现平板电容结构,将绝缘的玻璃作为电极基底与绝缘体上硅(SOI)硅器件层键合,不仅实现了良好的电隔离,提高了器件的稳定性,且能很好地与阵列扩展兼容。制备出的1×4微镜阵列可实现X/Y方向的二维(2D)准静态驱动,测试结果与有限元仿真结果基本吻合。结果表明,微镜内、外轴可分别在26.5V和29.5V的直流电压驱动下达到±2°机械转角,微镜响应时间为5ms。Based on MEMS processing,a 2D quasi-static driven micromirror array(MMA)used in optical communication field is designed and fabricated.Compared with the comb-drive micromirror,the electrostatic micromirror based on the parallel-plate capacitor is easier to form a high duty-factor array arrangement,which is beneficial to be used in all-optical switching as an optical switch matrix.By designing“vertical serpentine”biaxial torsion axis structure with a small coefficient of elasticity,effectively reduces the driving voltage of the micromirror,and the silicon-glass anodic bonding process is used to make the parallel plate capacitor structure,and the insulated glass is used as the electrode substrate to bond with the silicon device layer of a silicon on insulator(SOI)wafer,which not only achieves good electrical isolation,improves the stability of devices,but also is well compatible with the array expansion.The fabricated 1×4 micromirror array can realize 2-D quasi-static driving in the X/Y direction.The test results are approximately consistent with the finite element simulation results.The results show that the mechanical rotation angles of the inner and outer-axis of the micromirror can reach ±2°at a DC voltage of 26.5 V and 29.5 V,respectively,and the response time of the micromirror is 5 ms.

关 键 词：微机电系统 微镜阵列 平行板静电驱动 阳极键合 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]