CVD金刚石材料发展现状分析  

Analysis of the Development Status of CVD Diamond Materials

作　　者：高旭辉[1] GAO Xuhui(University of Science and Technology Beijing,Beijing,100083 China)

机构地区：[1]北京科技大学,北京100083

出　　处：《科技资讯》2024年第17期126-129,共4页Science & Technology Information

摘　　要：金刚石除具有宝石属性外,还是一种集声、光、热、力、电、量子等众多优异性能于一身的多功能超极限材料,被赋予“钻石恒久远”“工业的牙齿”“终极半导体”等众多美誉,有着很高的商业价值、工业价值和科研价值。化学气相沉积(Chemical Vapor Deposition,CVD)技术的发展,极大地拓展了金刚石材料的应用领域,为激活金刚石的各项终极潜能提供了基础。近年来,大尺寸、高质量、低成本、多样式的CVD金刚石材料不断被开发,终端应用场景已经从早期的工具级逐渐拓展至装饰、热学、光学,甚至半导体等高端领域,并且呈小幅井喷的态势。围绕CVD金刚石材料的研究与应用现状展开梳理,介绍CVD金刚石生长技术、应用领域和前沿研究进展,并对未来金刚石材料的发展趋势进行展望。Besides its gem properties,diamond is also a multi-functional ultra-extreme material that integrates many excellent properties,such as sound,light,heat,force,electricity,and quantum.It has been endowed with many reputations such as"diamond forever","industrial tooth","ultimate semiconductor",etc.,and has high com⁃mercial value,industrial value,and scientific research value.The development of Chemical Vapor Deposition(CVD)technology has greatly expanded the application fields of diamond materials and provided a foundation for activating the ultimate potential of diamond.In recent years,large-size,high-quality,low-cost and multi-style CVD diamond materials have been continuously developed,and the end use scenarios have gradually expanded from the early tool level to high-end fields such as decoration,thermodynamics,optics,and even semiconductors,showing a slight surge trend.In this paper,the research and application status of CVD diamond materials are con⁃ducted,the growth technology of CVD diamond,application fields the progress of and cutting-edge research are introduced,and the development trend of diamond materials in the future is prospected.

关 键 词：金刚石 化学气相沉积 热沉材料 光学窗口 金刚石半导体 氮空位中心 

分 类 号：TQ163[化学工程—高温制品工业]