针对曲面光学元件的五轴表面形貌测量系统结构参数标定  

Calibration of Structural Parameters of Five-Axis Surface Topography Measurement System for Curved Optics

作　　者：杨俊 沈毅君[1] 刘嘉宇 温荣贤 任明俊 苏榕 Yang Jun;Shen Yijun;Liu Jiayu;Wen Rongxian;Ren Mingjun;Su Rong(School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China;Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]上海交通大学机械与动力工程学院,上海200240 [2]中国科学院上海光学精密机械研究所,上海201800

出　　处：《激光与光电子学进展》2024年第17期204-212,共9页Laser & Optoelectronics Progress

基　　金：国家重点研发计划变革性专项课题(2019YFA0706701);国家自然科学基金项目(52175477);国家自然科学基金青年科学基金项目(52305546);国家自然基金合作研究项目(U22A20176);上海市高新技术领域项目(22511102103)。

摘　　要：针对曲面光学元件的表面形貌测量,将自研扫描白光干涉测头集成到Moore五轴运动平台上构建了一套五轴白光干涉测量系统。为了实现自动化测量,研究了该系统的运动学模型并解得逆运动学方程组。对于逆运动学方程组中的未知参数,提出一种使用已知表达式的高精度非球面标定件的标定方法。最后进行了标定精度验证实验,结果表明,自动调焦调平后实际对焦点坐标与理论对焦点坐标误差不超过±3μm,满足测头的测量需求,能够对曲面光学元件表面形貌进行自动化测量。A five-axis white-light interference-measurement system is constructed by integrating a self-developed coherence scanning interferometric probe into a Moore five-axis motion platform for the surface-morphology measurement of curved optical components.To achieve automated measurement,the kinematic model of the system is investigated and the inverse kinematic equations are solved.A calibration method using high-precision aspherical calibration components with known expressions is proposed for unknown parameters in the inverse kinematics equations.Finally,an experiment to verify the calibration accuracy of the proposed system is conducted,and the results show that after automatic focusing and leveling,the error between the actual and theoretical focal coordinates remains less than±3μm.The measurement requirements of the probe is satisfied,and the proposed system can automatically measure the surface morphology of curved optical components.

关 键 词：扫描白光干涉技术 表面形貌测量 五轴白光干涉测量系统 运动学模型 参数标定 

分 类 号：O436[机械工程—光学工程]