变刚度微定位平台控制策略的鲁棒性研究  

Research on the Robustness of Control Strategy of Variable Stiffness Micro-Positioning Stage

作　　者：蔡炳彧 卢旭锦 陈超然 CAI Bing-yu;LU Xu-jin;CHEN Chao-ran(Shantou Polytechnic,Shantou 515000,China)

机构地区：[1]汕头职业技术学院,广东汕头515000

出　　处：《机械工程与自动化》2024年第6期50-52,共3页Mechanical Engineering & Automation

基　　金：广东省教育厅“机电一体化技术”广东省高水平专业群建设项目(GSPZYQ2020030);汕头职业技术学院2022年校级科研重点课题(SZK2022Z02);汕头职业技术学院横向科研项目(SZ2023-KY-016)。

摘　　要：柔性微动平台大多数采用柔性铰链作为导向机构,在实际工况下,微动平台除了系统未知扰动外,柔性铰链本身由于频繁的拉伸变形,使得微动平台的刚度难免发生改变,由此导致控制系统的被控对象数学模型发生变化,影响系统控制精度与性能。为进一步提高柔性微动平台的鲁棒性,设计了自抗扰控制算法,通过ESO(扩张状态观测器)进行估计补偿。最后在变刚度工况下,进行PID和自抗扰控制策略的仿真对比。相比PID,自抗扰控制具有强鲁棒性,刚度变化对微动平台控制性能几乎没有影响,并且在最优控制下定位精度提高了一个分辨率,整定时间缩短了75.9%。Flexural hinge is used as the guiding mechanism in most of the flexible fretting stage.In actual working conditions,the stiffness of the fretting stage will inevitably change due to the frequent tensile deformation of the flexural hinge in addition to the unknown disturbance of the system.This results in the change of the mathematical model of the controlled object of the control system,which affects the control accuracy and performance of the system.In order to further improve the robustness of the flexible micro-motion stage,an active disturbance rejection control algorithm is designed,and ESO(Extended state Observer)is used to estimate compensation.Finally,the PID and auto-disturbance rejection control strategies are compared under variable stiffness conditions.Compared with PID,the active disturbance rejection control algorithm has strong robustness,and the stiffness change has little effect on the control performance of the micro-motion stage.Under the optimal control,the positioning accuracy is improved by one resolution and the setting time is shortened by 75.9%.

关 键 词：变刚度 微动定位平台 自抗扰控制 鲁棒性 

分 类 号：TP273.3[自动化与计算机技术—检测技术与自动化装置]