基于温度梯度衰减器的高精度温度控制系统  

High Precision Temperature Control System Based on Temperature Gradient Attenuator

作　　者：彭杰峰 胡亮[1] 申英男 苏芮 傅新[1] PENG Jiefeng;HU Liang;SHEN Yingnan;SU Rui;FU Xin(The State Key Lab of Fluid Power and Mechatronic System,Zhejiang University,Hangzhou,Zhejiang 310027)

机构地区：[1]浙江大学流体动力与机电系统国家重点实验室,浙江杭州310027

出　　处：《液压与气动》2024年第11期46-52,共7页Chinese Hydraulics & Pneumatics

基　　金：浙江省自然科学基金重大项目(LD24E050008);中央高校基本科研业务费专项(226-2024-00155)。

摘　　要：面向半导体制造装备等精密设备和仪器的高精度温控需求,提出了一种基于温度梯度衰减器的高精度温度控制系统。首先,将加热器作为温度调节器,实现对低频温度扰动的补偿;并且,利用温度梯度衰减器的流动混合机制,实现对流体温度高频扰动的削减;两者互补共同构成高精度温控系统。基于MATLAB/Simulink搭建仿真模型,在模型预测控制下对高精度温控系统的时域和频域进行扰动衰减分析。通过实验与仿真结果对比,发现与传统PID控制相比,采用模型预测控制的温控系统在热扰动引起的温升阶段最大温升降低了24%。结果验证了基于温度梯度衰减器的高精度温控系统的优异衰减效果及抗扰性能。To address the high precision temperature control requirements of semiconductor manufacturing equipment and other precision devices and instruments,a high precision temperature control system based on a temperature gradient attenuator is proposed.First,the heater is used as a temperature regulator to compensate for low-frequency temperature disturbances.Additionally,the flow mixing mechanism of the temperature gradient attenuator is employed to reduce high-frequency temperature disturbances in the fluid.Together,these components form a complementary high precision temperature control system.A simulation model is constructed using MATLAB/Simulink.Under model predictive control,disturbance attenuation analysis of the high precision temperature control system is conducted in both time and frequency domains.By comparing experimental and simulation results,it is found that the maximum temperature rise in the temperature control system using model predictive control is reduced by 24%during the temperature rise phase caused by thermal disturbances,compared to traditional PID control.The results validate the superior attenuation effect and disturbance rejection performance of the high precision temperature control system based on the temperature gradient attenuator.

关 键 词：高精度温控 温度梯度衰减器 模型预测控制 

分 类 号：TH137[机械工程—机械制造及自动化]