参激微机械谐振器幅频响应的翘尾效应及其电热调控  

The Tail-up Effect of Amplitude-Frequency Response and Its Electrothermal Control of Parametrically Excited Microelectromechanical Resonators

作　　者：刘中华[1] 徐友良 宦荣华[2,3] Liu Zhonghua;Xu Youliang;Huan Ronghua(School of Architecture and Civil Engineering,Xiamen University,Xiamen 361005,China;Department of Mechanics,Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province,Zhejiang University,Hangzhou 310027,China;Huanjiang Laboratory,Shaoxing 311800,China)

机构地区：[1]厦门大学建筑与土木工程学院,厦门361005 [2]浙江大学应用力学研究所,浙江省软体机器人与智能器件研究重点实验室,杭州310027 [3]浣江实验室,绍兴311800

出　　处：《动力学与控制学报》2024年第10期51-58,共8页Journal of Dynamics and Control

基　　金：国家自然科学基金资助项目(12172323);浙江省自然科学基金重点项目(LZ22A020003)。

摘　　要：静电参激的微机械谐振器具有响应幅值大、相位噪声小等优势,近年来成为MEMS动力学领域研究热点.本文研究了微机械梁谐振器在强静电参激下的高阶非线性响应及基于电热电流的响应调控方法.首先,实验发现强静电力参数激励下微机械梁谐振器的幅频响应不再是Duffing硬化曲线,而在响应后半段出现“翘尾”现象.接着,建立了非线性谐振器的参激动力学模型,理论分析表明“翘尾”现象是由非线性阻尼和高阶非线性刚度共同作用引起.然后,研究了梁本体的电热电流对参激响应的影响规律,电热电流的引入会增加微谐振器的热弹性阻尼和轴向应力,从而实现响应幅值和共振区间的大幅调控.In recent years,parametrically MEMS resonators,characterized by their large response amplitude and low phase noise,have emerged as a focal point in the field of MEMS dynamics.This paper investigates the high-order nonlinear response of micro-mechanical beam resonators under strong parametric excitation,as well as the influence of electrothermal currents on parametric resonance response.Firstly,experimental data reveal that under strong parametric excitation,the amplitude-frequency response of micro-mechanical beam resonators no longer follows the Duffing hardening curve but exhibits a“tail-up”phenomenon in the latter half of the response curve.Subsequently to these observations,a parametric dynamic model of the nonlinear resonator is established.Theoretical analysis indicates that the“tail-up”phenomenon arises from the combined effects of nonlinear damping and high-order nonlinear stiffness.Furthermore,the paper investigates the influence of electrothermal currents on the parametric response of the beam.It is demonstrated that the introduction of electrothermal current increases the thermal elastic damping and axial stress of the micro-resonator,thereby significantly adjusting the response amplitude and resonance range.

关 键 词：MEMS谐振器 参激共振 非线性 幅频响应 

分 类 号：O322[理学—一般力学与力学基础]