高性能双模式压电驱动氮化铝音叉型谐振器  

High Performance Dual-Mode Piezoelectric Actuated AlN Tuning Fork Resonator

作　　者：原毅 杨清瑞 张志强 李浩霖 石帅 牛鹏飞 李全宁 陈雪娇 张孟伦 YUAN Yi;YANG Qingrui;ZHANG Zhiqiang;LI Haolin;SHI Shuai;NIU Pengfei;LI Quanning;CHEN Xuejiao;ZHANG Menglun(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China;School of Electronic Science&Engineering,IC College,Southeast University,Nanjing Jiangsu 210096,China)

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]东南大学电子科学与工程学院集成电路学院,江苏南京210096

出　　处：《传感技术学报》2024年第11期1849-1855,共7页Chinese Journal of Sensors and Actuators

基　　金：国家重点研发计划项目(硅基压电薄膜及器件关键技术与平台)资助项目(2020YFB2008800)。

摘　　要：设计并制造了一种面向质量传感器应用的高性能双模式压电驱动音叉型谐振器。测试结果表明,真空中该谐振器扭转振动模式的Q值为9274,面内弯曲振动模式的Q值为11379;空气中两种振动模式的Q值分别为1019和1059,使该谐振器可以灵活应用在不同空气阻尼环境中。通过有限元仿真研究了两种振动模式对音叉结构不同位置和覆盖率的质量负载的灵敏度特性。研究结果表明,扭转振动模式和面内弯曲振动模式分别在质量负载位于振动臂根部和前端时具有最大的灵敏度,因此,可以通过在音叉结构不同位置设置不同敏感膜,从而实现对不同物质实时高灵敏度的在线测量。A high performance dual-mode piezoelectric actuated tuning fork resonator is designed and fabricated for quantity sensing applications.Testing results show that the quality factors(Q)of torsional mode and flexural mode in vacuum are 9274 and 11379 respectively.The Q of the torsional mode and flexural mode in air are 1019 and 1059,respectively,which enables the resonator to find applications in environments with varying degrees of air damping.The relationship between the location and coverage of mass loading and the sensitivity of both modes is investigated by using finite element simulation.The simulation results show that the maximum sensitivity can be obtained when the mass loading is located at the fixed end and free end of the arms of the resonator.As a result,online measurements with real-time high sensitivity for different substances can be achieved by placing different sensing film at different positions on the resonator.

关 键 词：微机电系统 质量传感器 有限元分析 微纳加工 压电驱动 氮化铝薄膜 音叉型谐振器 双模式 

分 类 号：TN384[电子电信—物理电子学]