大行程并联六自由度微定位平台的设计  

Design of large stroke parallel 6-DoF micro-positioning platform

作　　者：吴志刚 周杨 王玉 朱楠楠 WU Zhigang;ZHOU Yang;WANG Yu;ZHU Nannan(School of Energy and Mechanical Engineering,Jiangxi University of Science and Technology,Nanchang 330013,China)

机构地区：[1]江西理工大学能源与机械工程学院,江西南昌330013

出　　处：《传感器与微系统》2024年第12期113-116,共4页Transducer and Microsystem Technologies

基　　金：江西省教育厅科学基金资助项目(GJJ200833);江西省科技厅自然科学面上项目(20232BAB204059)。

摘　　要：基于柔性铰链,设计了一种六自由度(6-DoF)微定位平台。该微平台具有大行程、6-DoF运动等优点。平台通过压电陶瓷驱动,使用虚功原理对位移放大器进行了静力学分析。利用Ansys有限元分析软件,对微平台进行了性能分析和模态分析。微定位平台采用边长为16.5 mm的八边形设计,在XYZ方向运动行程为272.94μm×283.66μm×312.29μm,平台尺寸为Φ150×5 mm^(3)。平台在微操作精密定位中具有重要意义,提高了平台的稳定性。A six degree-of-freedom(6-DoF)micro-positioning platform is designed based on flexure hinge.The micro-platform has the advantages of large stroke and 6-DoF movement.The platform is driven by piezoelectric ceramics and the static analysis of displacement amplifier is carried out using the principle of virtual work.The performance analysis and modal analysis of the micro platform are carried out using Ansys finite element analysis(FEA)software.The micro-positioning platform is octagonal with side length of 16.5 mm.The motion stroke of the micro-positioning platform in direction XYZ is 272.94μm×283.66μm×312.29μm with the platform size of Φ150×5 mm^(3).The platform plays an important role in precise positioning of micro-operations,and the stability of the platform is improved.

关 键 词：六自由度 大行程 有限元 柔性铰链 

分 类 号：TH112[机械工程—机械设计及理论] TP212[自动化与计算机技术—检测技术与自动化装置]