高灵敏度石英振梁加速度计的设计与研制  

Design and Manufacture of High Sensitivity Quartz Vibrating Beam Accelerometer

作　　者：林盛受 徐承诚 梁金星[1] LIN Shengshou;XU Chengcheng;LIANG Jinxing(School of Instrument Science and Engineering,Southeast University,Nanjing 210096)

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《导航与控制》2024年第3期56-61,共6页Navigation and Control

摘　　要：石英振梁加速度计因其高精度和高稳定性成为加速度计研究的热点之一。为解决石英振梁加速度计存在标度因数难以提高的问题,提出并研制了一种一体式石英振梁加速度计。介绍了该加速度计的结构模型并展开了理论分析,指出了提高标度因数的可行途径。通过有限元仿真分析确定了加速度计的具体结构,采用湿法刻蚀等工艺制作敏感结构并进行了真空封装。经测试,该加速度计标度因数达到了254.4 Hz/g,零偏稳定性为4.4μg,标度因数稳定性为2.8×10^(-6)。测试结果表明,所提出的一体式石英振梁加速度计具有大标度因数、高稳定性的特点,可应用于高精度的惯导系统。Quartz vibrating beam accelerometer QVBA has become a research focus due to its high precision and stability.To address the challenges of difficulty in improving the scale factor of QVBA,a novel monolithic QVBA is proposed and developed.In this paper,the structure of the monolithic QVBA is introduced and the theoretical analyses is conducted,therefore the feasible approaches to improve the scale factor is pointed out.Finite element simulation analysis is performed to determine the specific structure of the accelerometer,and sensitive structures are fabricated using wet etching processes followed by vacuum packaging.Experimental results indicated that a scale factor up to 254.4 Hz/g,a scale factor stability of 2.8×10^(-6) and a bias stability of 4.4μg are achieved.The results demonstrate that the proposed monolithic quartz vibrating beam accelerometer features a large scale factor and high stability,making it suitable for high-precision inertial navigation systems.

关 键 词：石英 微机电系统 谐振 振梁加速度计 标度因数 湿法刻蚀 高精度 

分 类 号：U666.1[交通运输工程—船舶及航道工程]